Wafer Surface Charging Model for Single-Wafer Wet-Spin Processes
Mui, D. S. L., Lenz, E. H., Cyterski, C., Venkataraman, K., Kawaguchi, M.
Published in IEEE transactions on semiconductor manufacturing (01.11.2011)
Published in IEEE transactions on semiconductor manufacturing (01.11.2011)
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Journal Article
Mobility degradation and transferred electron effect in gallium arsenide and indium gallium arsenide
Arora, V.K., Mui, D.S.L., Morkoc, H.
Published in IEEE transactions on electron devices (01.06.1987)
Published in IEEE transactions on electron devices (01.06.1987)
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Journal Article
Etching With Aqueous HF: Design and Development of a Laboratory-Scale Integrated Wet Etch/Dry Reactor
Pande, A A, Mui, D S L, Hess, D W
Published in IEEE transactions on semiconductor manufacturing (01.02.2011)
Published in IEEE transactions on semiconductor manufacturing (01.02.2011)
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Journal Article
Line-profile and critical-dimension monitoring using a normal incidence optical CD metrology
Yang, Weidong, Hu, Jiangtao, Lowe-Webb, R, Korlahalli, R, Shivaprasad, D, Sasano, H, Liu, Wei, Mui, D S L
Published in IEEE transactions on semiconductor manufacturing (01.11.2004)
Published in IEEE transactions on semiconductor manufacturing (01.11.2004)
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Journal Article
Analysis of in-situ etched and regrown AlInAs/GaInAs interfaces
CHAVARKAR, P, MUI, D. S. L, STRAND, T, COLDREN, L. A, MISHRA, U. K
Published in Journal of crystal growth (1997)
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Published in Journal of crystal growth (1997)
Conference Proceeding
Characteristics of in-situ deposited Si3N4/Si/In0.53Ga0.47As metal-insulator-semiconductor structures
MUI, D. S. L, DEMIREL, A. L, STRITE, S, WANG, Z, REED, J, BISWAS, D, MORKOC, H
Published in Journal of crystal growth (01.02.1993)
Published in Journal of crystal growth (01.02.1993)
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Conference Proceeding
Journal Article
Devices for phase-alternated decoupling in liquids. liquids crystals, and solids
MUI, D. S. L, FUNG, B. M, BONNELL, I. R, ENWALL, E. L
Published in Journal of magnetic resonance (1969) (1985)
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Published in Journal of magnetic resonance (1969) (1985)
Journal Article
Evaluation of broadband decoupling sequences applied to liquid crystal solutions
Fung, B.M, Mui, David S.L, Bonnell, Israel R, Enwall, Eric L
Published in Journal of magnetic resonance (1969) (15.06.1984)
Published in Journal of magnetic resonance (1969) (15.06.1984)
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Journal Article