(Invited) Deep Silicon Etching - Increasingly Relevant >20 Years on
Thomas, Dave, Muggeridge, Matthew, Hopkins, Janet, Launay, Nicolas, Ashraf, Huma, Barrass, Tony
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
(Invited) Deep Silicon Etching Increasingly Relevant >20 Years on
Thomas, Dave, Muggeridge, Matthew, Hopkins, Janet, Launay, Nicolas, Ashraf, Huma, Barrass, Tony
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article
Etch, dielectrics and metal barrier-seed for low temperature through-silicon via processing
Buchanan, K., Burgess, S., Giles, K., Muggeridge, M., Hao Zhao
Published in 2009 IEEE International Conference on 3D System Integration (01.09.2009)
Published in 2009 IEEE International Conference on 3D System Integration (01.09.2009)
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