An Approach for Factory-Wide Control Utilizing Virtual Metrology
Khan, A.A., Moyne, J.R., Tilbury, D.M.
Published in IEEE transactions on semiconductor manufacturing (01.11.2007)
Published in IEEE transactions on semiconductor manufacturing (01.11.2007)
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Journal Article
Conference Proceeding
SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing
Moyne, J.R., Hajj, H., Beatty, K., Lewandowski, R.
Published in IEEE transactions on semiconductor manufacturing (01.11.2007)
Published in IEEE transactions on semiconductor manufacturing (01.11.2007)
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Journal Article
Conference Proceeding
Using deadbands to reduce communication in networked control systems
Otanez, P.G., Moyne, J.R., Tilbury, D.M.
Published in Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301) (01.01.2002)
Published in Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301) (01.01.2002)
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Conference Proceeding
An application of entity-relationship data modeling techniques to the automated manufacturing process
Moyne, J.R., McAfee, L.C., Teorey, T.J.
Published in Proceedings. Second International Conference on Data and Knowledge Systems for Manufacturing and Engineering (1989)
Published in Proceedings. Second International Conference on Data and Knowledge Systems for Manufacturing and Engineering (1989)
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Conference Proceeding
Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher
Rashap, B.A., Lafortune, S., Moyne, J.R., Teneketzis, D., Terry, F.L., Elta, M.E., Etemad, H., Fournier, J.P., Freudenberg, J.S., Giles, M.D., Grizzle, J.W., Kabamba, P.T., Khargonekar, P.P.
Published in IEEE transactions on semiconductor manufacturing (01.08.1995)
Published in IEEE transactions on semiconductor manufacturing (01.08.1995)
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Journal Article
Performance evaluation of wireless networks for factory automation applications
Anand, D.M., Moyne, J.R., Tilbury, D.M.
Published in 2009 IEEE International Conference on Automation Science and Engineering (01.08.2009)
Published in 2009 IEEE International Conference on Automation Science and Engineering (01.08.2009)
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Conference Proceeding
A generic cell controller for the automated VLSI manufacturing facility
Moyne, J.R., McAfee, L.C.
Published in IEEE transactions on semiconductor manufacturing (01.05.1992)
Published in IEEE transactions on semiconductor manufacturing (01.05.1992)
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Journal Article
A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry
Zhe Ning, Moyne, J.R., Smith, T., Boning, D., Del Castillo, E., Jinn-Yi Yeh, Hurwitz, A.
Published in IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings (1996)
Published in IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings (1996)
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Conference Proceeding
Control performance study of a networked machining cell
Feng-Li Lian, Moyne, J.R., Tilbury, D.M.
Published in Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334) (2000)
Published in Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334) (2000)
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Conference Proceeding
A prototype SECS message service for communication in the semiconductor manufacturing environment
Moyne, J.R., McAfee, L.C.
Published in IEEE transactions on semiconductor manufacturing (01.11.1989)
Published in IEEE transactions on semiconductor manufacturing (01.11.1989)
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Journal Article