Aggregation Numbers of Cationic Oligomeric Surfactants: A Time-Resolved Fluorescence Quenching Study
Wattebled, Laurent, Laschewsky, André, Moussa, Alain, Habib-Jiwan, Jean-Louis
Published in Langmuir (14.03.2006)
Published in Langmuir (14.03.2006)
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Journal Article
Metrology for Monitoring and Detecting Process Issues in a TSV Module
Philipsen, Harold, Vandersmissen, Kevin, Cockburn, Andrew, Erickson, David, Drijbooms, Chris, Moussa, Alain, Bender, Hugo, Struyf, Herbert
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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Journal Article
Direct Measurement of the End-to-End Distance of Individual Polyfluorene Polymer Chains
Muls, Benoît, Uji-i, Hiroshi, Melnikov, Sergey, Moussa, Alain, Verheijen, Wendy, Soumillion, Jean-Philippe, Josemon, Jacob, Müllen, Klaus, Hofkens , Johan
Published in Chemphyschem (11.11.2005)
Published in Chemphyschem (11.11.2005)
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Journal Article
Biaxial and Uniaxial Compressive Stress Implemented in Ge(Sn) pMOSFET Channels by Advanced Reduced Pressure Chemical Vapor Deposition Developments
Vincent, Benjamin, Gencarelli, Federica, Lin, Denis, Nyns, Laura, Richard, Olivier, Bender, Hugo, Douhard, Bastien, Moussa, Alain, Merckling, Clement, Witters, Liesbeth, Vandervorst, Wilfried, Loo, Roger, Caymax, Matty, Heyns, Marc
Published in ECS transactions (04.10.2011)
Published in ECS transactions (04.10.2011)
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Journal Article
Dielectric reliability of 70nm pitch air-gap interconnect structures
Pantouvaki, Marianna, Sebaai, Farid, Kellens, Kristof, Goossens, Danny, Vereecke, Bart, Versluijs, Janko, Van Besien, Els, Caluwaerts, Rudy, Marrant, Koen, Bender, Hugo, Moussa, Alain, Struyf, Herbert, Beyer, Gerald P.
Published in Microelectronic engineering (01.07.2011)
Published in Microelectronic engineering (01.07.2011)
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Journal Article
In Situ Phosphorus Doping of Germanium by APCVD
Dilliway, Gabriela, Van Den Boom, Ruud, Moussa, Alain, Leys, Frederik, Van Daele, Benny, Parmentier, Brigitte, Clarysse, Trudo, Simoen, Eddy R., Defranoux, C., Meuris, Marc M., Benedetti, Alessandro, Richard, Olivier, Bender, Hugo
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
A Path to EUV Photoresist Reference Metrology Using Restricted Tilt Electron Tomography
Barnum, Andrew, Biedrzycki, Mark, Moussa, Alain
Published in Microscopy and microanalysis (01.08.2020)
Published in Microscopy and microanalysis (01.08.2020)
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Journal Article
Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
Popovici, Mihaela, Groven, Benjamin, Marcoen, Kristof, Phung, Quan Manh, Dutta, Shibesh, Swerts, Johan, Meersschaut, Johan, van den Berg, Jaap A, Franquet, Alexis, Moussa, Alain, Vanstreels, Kris, Lagrain, Pieter, Bender, Hugo, Jurczak, Malgorzata, Van Elshocht, Sven, Delabie, Annelies, Adelmann, Christoph
Published in Chemistry of materials (13.06.2017)
Published in Chemistry of materials (13.06.2017)
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Journal Article
Metal Etch Depth Metrology using YieldStar and CDSEM
Anunciado, Roy, Aliaj, Ilirjan, Van Haren, Richard, Truffert, Vincent, Moussa, Alain, Goossens, Danny, Tamaddon, Amir-Hossein
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
e-beam metrology of thin resist for high NA EUVL
Lorusso, Gian Francesco, De Simone, Danilo, Zidan, Mohamed, Severi, Joren, Moussa, Alain, Dey, Bappaditya, Halder, Sandip, Goldenshtein, Alex, Houchens, Kevin, Santoro, Gaetano, Fischer, Daniel, Muellender, Angelika, Mack, Chris, Kondo, Tsuyoshi, Shohjoh, Tomoyasu, Ikota, Masami, Charley, Anne-Laure, De Gendt, Stefan, Leray, Philippe
Published in Japanese Journal of Applied Physics (01.06.2023)
Published in Japanese Journal of Applied Physics (01.06.2023)
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Journal Article
Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure
Jayachandran, Suseendran, Billen, Arne, Douhard, Bastien, Conard, Thierry, Meersschaut, Johan, Moussa, Alain, Caymax, Matty, Bender, Hugo, Vandervorst, Wilfried, Heyns, Marc, Delabie, Annelies
Published in Applied surface science (30.10.2016)
Published in Applied surface science (30.10.2016)
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Journal Article
Phase Formation and Morphology of Nickel Silicide Thin Films Synthesized by Catalyzed Chemical Vapor Reaction of Nickel with Silane
Peter, Antony Premkumar, Meersschaut, Johan, Richard, Olivier, Moussa, Alain, Steenbergen, Johnny, Schaekers, Marc, Tőkei, Zsolt, Van Elshocht, Sven, Adelmann, Christoph
Published in Chemistry of materials (13.01.2015)
Published in Chemistry of materials (13.01.2015)
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Journal Article
Width‐Dependent Sheet Resistance of Nanometer‐Wide Si Fins as Measured with Micro Four‐Point Probe
Bogdanowicz, Janusz, Folkersma, Steven, Sergeant, Stefanie, Schulze, Andreas, Moussa, Alain, Petersen, Dirch H., Hansen, Ole, Henrichsen, Henrik H., Nielsen, Peter F., Vandervorst, Wilfried
Published in Physica status solidi. A, Applications and materials science (21.03.2018)
Published in Physica status solidi. A, Applications and materials science (21.03.2018)
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Journal Article
DEVICE AND METHOD FOR CORRECTING DIRECTIONAL DRIFTS IN TOPOGRAPHIC IMAGE DATA
PAREDIS KRISTOF, MOUSSA ALAIN, CERBU DORIN, CHARLEY ANNE LAURE, LERAY PHILIPPE
Year of Publication 15.10.2021
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Year of Publication 15.10.2021
Patent
Si nanoripples: A growth dynamical study
Dhillon, Prabhjeet Kaur, Sarkar, Subhendu, Franquet, Alexis, Moussa, Alain, Vandervorst, Wilfried
Published in Applied surface science (01.10.2012)
Published in Applied surface science (01.10.2012)
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Journal Article
Ultrathin NiGe Films Prepared via Catalytic Solid–Vapor Reaction of Ni with GeH4
Peter, Antony P, Opsomer, Karl, Adelmann, Christoph, Schaekers, Marc, Meersschaut, Johan, Richard, Olivier, Vaesen, Inge, Moussa, Alain, Franquet, Alexis, Zsolt, Tokei, Van Elshocht, Sven
Published in ACS applied materials & interfaces (09.10.2013)
Published in ACS applied materials & interfaces (09.10.2013)
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Journal Article
Microfabricated diamond tip for nanoprobing
Arstila, Kai, Hantschel, Thomas, Demeulemeester, Cindy, Moussa, Alain, Vandervorst, Wilfried
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Ultrathin NiGe Films Prepared via Catalytic Solid–Vapor Reaction of Ni with GeH 4
Peter, Antony P., Opsomer, Karl, Adelmann, Christoph, Schaekers, Marc, Meersschaut, Johan, Richard, Olivier, Vaesen, Inge, Moussa, Alain, Franquet, Alexis, Zsolt, Tokei, Van Elshocht, Sven
Published in ACS applied materials & interfaces (09.10.2013)
Published in ACS applied materials & interfaces (09.10.2013)
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Journal Article