Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone
Mousa, Moataz Bellah M, Oldham, Christopher J, Parsons, Gregory N
Published in Langmuir (08.04.2014)
Published in Langmuir (08.04.2014)
Get full text
Journal Article
Atmospheric Pressure Atomic Layer Deposition of Al 2 O 3 Using Trimethyl Aluminum and Ozone
Mousa, Moataz Bellah M., Oldham, Christopher J., Parsons, Gregory N.
Published in Langmuir (08.04.2014)
Published in Langmuir (08.04.2014)
Get full text
Journal Article