LiTaO3/silicon composite wafers for the fabrication of low loss low TCF high coupling resonators for filter applications
Courjon, E., Ballandras, S., Daniau, W., Baron, T., Moulet, J. B., Signamarcheix, T.
Published in 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) (01.05.2015)
Published in 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) (01.05.2015)
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