Process optimization of copper MOCVD using modeling experimental design
Mouche, Marie-José, Mermet, Jean-Luc, Pires, Fabrice, Richard, Emmanuel, Torres, Joaquin, Palleau, Jean, Braud, François
Published in Applied surface science (01.10.1995)
Published in Applied surface science (01.10.1995)
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Journal Article
Metal—organic chemical vapor deposition of copper using hydrated copper formate as a new precursor
Mouche, Marie-José, Mermet, Jean-Luc, Romand, Maurice, Charbonnier, Marlène
Published in Thin solid films (15.06.1995)
Published in Thin solid films (15.06.1995)
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Journal Article