Microelectrical mechanical system with improved beam suspension
HARRIS, RICHARD D, LARSSON, HENRIC, MORRIS, WINFRED L, YAO, JUN J, KRETSCHMANN, ROBERT J, HERBERT, PATRICK C, ANNIS, JEFFREY R
Year of Publication 20.05.2009
Get full text
Year of Publication 20.05.2009
Patent
MICRO ELECTROMECHANICAL SYSTEM (MEMS) DEVICE
HERBERT PATRICK C, LARSSON HENRIC, MORRIS WINFRED L, ANNIS JEFFREY R, KNIESER MICHAEL J, DUMMERMUTH ERNST H, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 02.04.2009
Get full text
Year of Publication 02.04.2009
Patent
Microelectricalmechanical system with improved beam suspension
HERBERT PATRICK C, MORRIS WINFRED L, LARSSON HENRIC, ANNIS JEFFREY R, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 23.05.2006
Get full text
Year of Publication 23.05.2006
Patent
Microelectricalmechanical system with improved beam suspension
Herbert, Patrick C, Annis, Jeffrey R, Yao, Jun J, Morris, Winfred L, Larsson, Henric, Harris, Richard D, Kretschmann, Robert J
Year of Publication 23.05.2006
Get full text
Year of Publication 23.05.2006
Patent
Microelectrical mechanical system with improved beam suspension
HARRIS, RICHARD D, LARSSON, HENRIC, MORRIS, WINFRED L, YAO, JUN J, KRETSCHMANN, ROBERT J, HERBERT, PATRICK C, ANNIS, JEFFREY R
Year of Publication 21.12.2005
Get full text
Year of Publication 21.12.2005
Patent
Microelectricalmechanical system with improved beam suspension
HERBERT PATRICK C, MORRIS WINFRED L, LARSSON HENRIC, ANNIS JEFFREY R, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 24.02.2005
Get full text
Year of Publication 24.02.2005
Patent
Microelectromechanical system (MEMS) with improved beam suspension
HERBERT PATRICK C, MORRIS WINFRED L, LARSSON HENRIC, ANNIS JEFFREY R, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 12.10.2004
Get full text
Year of Publication 12.10.2004
Patent
Microelectromechanical system (MEMS) with improved beam suspension
Herbert, Patrick C, Annis, Jeffrey R, Yao, Jun J, Morris, Winfred L, Larsson, Henric, Harris, Richard D, Kretschmann, Robert J
Year of Publication 12.10.2004
Get full text
Year of Publication 12.10.2004
Patent
Microelectromechanical system with improved beam suspension
Herbert, Patrick, Annis, Jeffrey, Yao, Jun, Morris, Winfred, Larsson, Henric, Harris, Richard, Kretschmann, Robert
Year of Publication 13.06.2002
Get full text
Year of Publication 13.06.2002
Patent
MICROELECTROMECHANICAL SYSTEM (MENS) DEVICE
ANNIS, JEFFREY, R, MORRIS, WINFRED, L, HERBERT, PATRICK, C, LARSSON, HENRIC, YAO, JUN, J, KNIESER, MICHAEL, J, KRETSCHMANN, ROBERT, J, HARRIS, RICHARD, D, DUMMERMUTH, ERNST, H
Year of Publication 25.05.2005
Get full text
Year of Publication 25.05.2005
Patent
Microelectrical mechanical system with improved beam suspension
HARRIS, RICHARD D, LARSSON, HENRIC, MORRIS, WINFRED L, YAO, JUN J, KRETSCHMANN, ROBERT J, HERBERT, PATRICK C, ANNIS, JEFFREY R
Year of Publication 02.05.2003
Get full text
Year of Publication 02.05.2003
Patent
Microelectromechanical system with improved beam suspension
HERBERT PATRICK C, MORRIS WINFRED L, LARSSON HENRIC, ANNIS JEFFREY R, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
Year of Publication 13.06.2002
Get full text
Year of Publication 13.06.2002
Patent
MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE INCLUDING AN ANALOG OR A DIGITAL
ANNIS, JEFFREY, R, MORRIS, WINFRED, L, HERBERT, PATRICK, C, LARSSON, HENRIC, YAO, JUN, J, KNIESER, MICHAEL, J, KRETSCHMANN, ROBERT, J, HARRIS, RICHARD, D, DUMMERMUTH, ERNST, H
Year of Publication 01.04.2004
Get full text
Year of Publication 01.04.2004
Patent