ZnSe crystal growth by radical assisted MOCVD
Hatanaka, Yoshinori, Aoki, Toru, Morita, Motohiko, Nakanishi, Yoichiro
Published in Applied surface science (01.07.1996)
Published in Applied surface science (01.07.1996)
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Journal Article
ZnSe epitaxial growth on Si(100) and Ge(100) by H-radical assisted MOCVD
Aoki, Toru, Morita, Motohiko, Noda, Daiji, Nakanishi, Yoichiro, Hatanaka, Yoshinori, Azuma, Naoto
Published in Applied surface science (01.04.1997)
Published in Applied surface science (01.04.1997)
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Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE YOSHINORI, INAZUKI YUKIO, YOSHIKAWA HIROKI, OKAZAKI SATOSHI, MORITA MOTOHIKO, SAGA TADASHI
Year of Publication 01.12.2009
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Year of Publication 01.12.2009
Patent
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
Yoshikawa, Hiroki, Inazuki, Yukio, Kinase, Yoshinori, Okazaki, Satoshi, Morita, Motohiko, Saga, Tadashi
Year of Publication 01.12.2009
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Year of Publication 01.12.2009
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Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE, YOSHINORI, MORITA, MOTOHIKO, SAGA, TADASHI, YOSHIKAWA, HIROKI, INAZUKI, YUKIO, OKAZAKI, SATOSHI
Year of Publication 22.04.2009
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Year of Publication 22.04.2009
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Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE, YOSHINORI, MORITA, MOTOHIKO, SAGA, TADASHI, YOSHIKAWA, HIROKI, INAZUKI, YUKIO, OKAZAKI, SATOSHI
Year of Publication 05.12.2007
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Year of Publication 05.12.2007
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TRANSLUCENT LAYERED FILM, PHOTOMASK BLANK, PHOTOMASK AND METHOD FOR MANUFACTURING THEM
KONASE YOSHIAKI, YOSHIKAWA HIROKI, INAZUKI SADAOMI, OKAZAKI SATOSHI, MORITA MOTOHIKO, SAGA TADASHI
Year of Publication 17.08.2006
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Year of Publication 17.08.2006
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Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE YOSHINORI, INAZUKI YUKIO, YOSHIKAWA HIROKI, OKAZAKI SATOSHI, SAGE TADASHI, MORITA MOTOHIKO
Year of Publication 10.08.2006
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Year of Publication 10.08.2006
Patent
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE, YOSHINORI, MORITA, MOTOHIKO, SAGA, TADASHI, YOSHIKAWA, HIROKI, INAZUKI, YUKIO, OKAZAKI, SATOSHI
Year of Publication 09.08.2006
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Year of Publication 09.08.2006
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HALF-TONE STACKED FILM, PHOTOMASK-BLANK, PHOTOMASK AND FABRICATION METHOD THEREOF
KINASE YOSHINORI, INAZUKI YUKIO, YOSHIKAWA HIROKI, OKAZAKI SATOSHI, MORITA MOTOHIKO, SAGA TADASHI
Year of Publication 09.08.2006
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Year of Publication 09.08.2006
Patent
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof
KINASE, YOSHINORI, MORITA, MOTOHIKO, SAGA, TADASHI, YOSHIKAWA, HIROKI, INAZUKI, YUKIO, OKAZAKI, SATOSHI
Year of Publication 21.03.2013
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Year of Publication 21.03.2013
Patent