Influences of pretreatment and hard baking on the mechanical reliability of SU-8 microstructures
Morikaku, Toshiyuki, Kaibara, Yoshinori, Inoue, Masatoshi, Miura, Takuya, Suzuki, Takaaki, Oohira, Fumikazu, Inoue, Shozo, Namazu, Takahiro
Published in Journal of micromechanics and microengineering (01.10.2013)
Published in Journal of micromechanics and microengineering (01.10.2013)
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Journal Article
Mechanical reliability of FIB-fabricated WC–Co cemented carbide nanowires evaluated by MEMS tensile testing
Namazu, Takahiro, Morikaku, Toshiyuki, Akamine, Hirokazu, Fujii, Tatsuya, Kuroda, Kazuki, Takami, Yasuhiro
Published in Engineering fracture mechanics (01.12.2015)
Published in Engineering fracture mechanics (01.12.2015)
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Journal Article
Possibility of cemented carbide as structural material for MEMS
Morikaku, Toshiyuki, Fujii, Tatsuya, Kuroda, Kazuki, Takami, Yasuhiro, Inoue, Shozo, Namazu, Takahiro
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
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