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Published in Frontiers in cardiovascular medicine (31.07.2020)
Published in Frontiers in cardiovascular medicine (31.07.2020)
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Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis
Okamoto, Yuki, Lebrasseur, Eric, Mori, Isao, Marty, Frederic, Mita, Yoshio
Published in IEEE transactions on semiconductor manufacturing (01.08.2017)
Published in IEEE transactions on semiconductor manufacturing (01.08.2017)
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Intravascular Ultrasound and Optical Coherent Tomography Combined Catheter
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Published in Interventional cardiology clinics (01.04.2023)
Published in Interventional cardiology clinics (01.04.2023)
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An end-point visualization test structure for all plasma dry release of Deep-RIE MEMS
Okamoto, Yuki, Lebrasseur, Eric, Mori, Isao, Mita, Yoshio
Published in 2016 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2016)
Published in 2016 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2016)
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