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Year of Publication 03.02.2009
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Dielectric material
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
SIMONS JOHN P, MEDEIROS DAVID R, PETRILLO KAREN E, MOREAU WAYNE MARTIN, BABICH KATHERINA E, LIN QINGHUANG, LATULIPE DOUGLAS CHARLES, ANGELOPOULOS MARIE
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
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Year of Publication 22.04.2008
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof
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Year of Publication 22.04.2008
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