DEVICE AND METHOD FOR INSPECTING EUV MASK BY ADJUSTING ILLUMINATION SYSTEM
MOON, Seung Chan, LEE, Dong Gi, AHN, Jin Ho, CHOI, Jin Hyuk, KIM, Young Woong
Year of Publication 07.12.2023
Get full text
Year of Publication 07.12.2023
Patent
DEVICE AND METHOD FOR MEASURING REFRACTION COEFFICIENT AND EXTINCTION COEFFICIENT OF EUV MASK MATERIAL
MOON, Seung Chan, LEE, Dong Gi, AHN, Jin Ho, CHOI, Jin Hyuk, KIM, Young Woong
Year of Publication 07.12.2023
Get full text
Year of Publication 07.12.2023
Patent
COMPREHENSIVE INSPECTION DEVICE FOR EUV EXPOSURE PROCESS
MOON, Seung Chan, LEE, Dong Gi, AHN, Jin Ho, CHOI, Jin Hyuk, KIM, Young Woong
Year of Publication 12.10.2023
Get full text
Year of Publication 12.10.2023
Patent
EUV Optical Constant Measurement Devices and Methods for EUV Specimens
CHO MIN SUN, MOON SEUNG CHAN, CHOI JIN HYUK, AHN JINHO, LEE DONGGI, JEONG DONGMIN, KIM YUN SOO, WON JIN KIM
Year of Publication 17.05.2024
Get full text
Year of Publication 17.05.2024
Patent
A NANO FIBER DENTAL MASK AND A METHOD OF MANUFACTURING THE SAME
PARK MI RA, MOON SEUNG CHAN, KIM JI YEON, KIM, MUN YOUNG, PARK YONG WAN, PANT BISHWESHWAR
Year of Publication 13.01.2022
Get full text
Year of Publication 13.01.2022
Patent
Manufacturing Method for Nurungji and Nurungji Using Thereof
JEONG, CHAE WON, SONG, KWON, MOON, SEUNG CHAN, SONG, YOUNG HEE, SONG, YOUNG HWA
Year of Publication 10.01.2018
Get full text
Year of Publication 10.01.2018
Patent
Highly scalable Z-RAM with remarkably long data retention for DRAM application
Tae-Su Jang, Joong-Sik Kim, Sang-Min Hwang, Young-Hoon Oh, Kwang-Myung Rho, Seoung-Ju Chung, Su-Ock Chung, Jae-Geun Oh, Bhardwaj, S., Jungtae Kwon, Kim, D., Nagoga, M., Yong-Taik Kim, Seon-Yong Cha, Seung-Chan Moon, Sung-Woong Chung, Sung-Joo Hong, Sung-Wook Park
Published in 2009 Symposium on VLSI Technology (01.06.2009)
Get full text
Published in 2009 Symposium on VLSI Technology (01.06.2009)
Conference Proceeding
Highly Scalable Saddle-Fin (S-Fin) Transistor for Sub-50nm DRAM Technology
Park, Sung-Wook, Hong, Sung-Joo, Kim, Jin-Woong, Jeong, Jae-Goan, Yoo, Kyung-Dong, Moon, Seung-Chan, Sohn, Hyun-Chul, Kwak, Noh-Jung, Cho, Yun-Seok, Baek, Seung-Joo, Park, Hyung-Soon, Yoon, Hyo Geun, Lee, Bong-Hoon, Kim, Jin-Soo, Hwang, Sun-Hwan, Lee, Lae-Hee, Cho, Heung-Jae, Cho, Sung Yoon, Chung, Chai-O, Kim, Kwang-Ok, Yoo, Min-Soo, Jang, Se-Aug, Lee, Sang-Don, Chung, Sung-Woong
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Get full text
Conference Proceeding