Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”
Lee, Ganggyu, Lee, Kangchun, Moon, Jinok, Song, Taeseup, Lee, Dong-Hee, Paik, Ungyu
Published in Materials & design (01.05.2024)
Published in Materials & design (01.05.2024)
Get full text
Journal Article
Communication-Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design
Seo, Jihoon, Moon, Jinok, Kim, Yehwan, Kim, Kijung, Lee, Kangchun, Cho, Yoonsung, Lee, Dong-Hee, Paik, Ungyu
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
Get full text
Journal Article
Ce3+-enriched core–shell ceria nanoparticles for silicate adsorption
Kim, Kijung, Seo, Jihoon, Lee, Myoungjae, Moon, Jinok, Lee, Kangchun, Yi, Dong Kee, Paik, Ungyu
Published in Journal of materials research (28.07.2017)
Published in Journal of materials research (28.07.2017)
Get full text
Journal Article
Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
Seo, Jihoon, Moon, Jinok, Moon, Sunho, Paik, Ungyu
Published in Applied surface science (30.10.2015)
Published in Applied surface science (30.10.2015)
Get full text
Journal Article
Role of the Surface Chemistry of Ceria Surfaces on Silicate Adsorption
Seo, Jihoon, Lee, Jung Woo, Moon, Jinok, Sigmund, Wolfgang, Paik, Ungyu
Published in ACS applied materials & interfaces (28.05.2014)
Published in ACS applied materials & interfaces (28.05.2014)
Get full text
Journal Article
Role of the oxidation state of cerium on the ceria surfaces for silicate adsorption
Seo, Jihoon, Moon, Jinok, Kim, Joo Hyun, Lee, Kangchun, Hwang, Junha, Yoon, Heesung, Yi, Dong Kee, Paik, Ungyu
Published in Applied surface science (15.12.2016)
Published in Applied surface science (15.12.2016)
Get full text
Journal Article
Multi-objective optimization of tungsten CMP slurry for advanced semiconductor manufacturing using a response surface methodology
Seo, Jihoon, Kim, Joo Hyun, Lee, Myoungjae, You, Keungtae, Moon, Jinok, Lee, Dong-Hee, Paik, Ungyu
Published in Materials & design (05.03.2017)
Published in Materials & design (05.03.2017)
Get full text
Journal Article
Size-dependent interactions of silica nanoparticles with a flat silica surface
Seo, Jihoon, Kim, Joo Hyun, Lee, Myoungjae, Moon, Jinok, Yi, Dong Kee, Paik, Ungyu
Published in Journal of colloid and interface science (01.12.2016)
Published in Journal of colloid and interface science (01.12.2016)
Get full text
Journal Article
Ce 3+ -enriched core–shell ceria nanoparticles for silicate adsorption
Kim, Kijung, Seo, Jihoon, Lee, Myoungjae, Moon, Jinok, Lee, Kangchun, Yi, Dong Kee, Paik, Ungyu
Published in Journal of materials research (28.07.2017)
Published in Journal of materials research (28.07.2017)
Get full text
Journal Article
Fenton-Like Reaction between Copper Ions and Hydrogen Peroxide for High Removal Rate of Tungsten in Chemical Mechanical Planarization
Kim, Kijung, Lee, Kangchun, So, Sounghyun, Cho, Sungwook, Lee, Myeongjae, You, Keungtae, Moon, Jinok, Song, Taeseup
Published in ECS journal of solid state science and technology (01.01.2018)
Published in ECS journal of solid state science and technology (01.01.2018)
Get full text
Journal Article
Barrier Metal Slurry for Low Defect Copper Damascene Chemical Mechanical Polishing
Kim, Hojoong, Seo, Kyewon, Moon, Jinok, Kim, Hyunsoo, Hwang, Hasub
Published in ECS transactions (07.04.2015)
Published in ECS transactions (07.04.2015)
Get full text
Journal Article
Ultrafine Particle Removal in the Wafer Cleaning Process Using an Aqueous Solution with a High Concentration of Dissolved O3 and HF
Kim, Tae Sung, Moon, Jinok, Kim, Yongmok, Han, Hyeon Joon, Kim, Charles, Hong, Seokjun, Ahn, Dukmin, Lee, Hunhee
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
Get full text
Journal Article
Control of adhesion force between ceria particles and polishing pad in shallow trench isolation chemical mechanical planarization
Seo, Jihoon, Moon, Jinok, Bae, Jae-Young, Yoon, Kwang Seob, Sigmund, Wolfgang, Paik, Ungyu
Published in Journal of nanoscience and nanotechnology (01.06.2014)
Published in Journal of nanoscience and nanotechnology (01.06.2014)
Get more information
Journal Article
Communication-Selective Adsorption of PEG on SiO2 for High Removal Selectivity in Tungsten CMP
Kim, Kijung, Lee, Kangchun, So, Sounghyun, Cho, Sungwook, Lee, Myeongjae, You, Keungtae, Moon, Jinok, Song, Taeseup
Published in ECS journal of solid state science and technology (01.01.2018)
Published in ECS journal of solid state science and technology (01.01.2018)
Get full text
Journal Article
Role of Surface Chemistry of Ceria Nanoparticles in CMP
Seo, Jihoon, Moon, Jinok, Kim, Kijung, Kim, Yehwan, Kim, Sangkyun, Paik, Ungyu
Published in Meeting abstracts (Electrochemical Society) (01.04.2014)
Published in Meeting abstracts (Electrochemical Society) (01.04.2014)
Get full text
Journal Article
Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP
Kim, Kijung, Lee, Kangchun, So, Sounghyun, Cho, Sungwook, Lee, Myeongjae, You, Keungtae, Moon, Jinok, Song, Taeseup
Published in ECS journal of solid state science and technology (2018)
Published in ECS journal of solid state science and technology (2018)
Get full text
Journal Article
Highly Dispersed Fe3+-Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization
Kim, Kijung, Seo, Jihoon, Lee, Myeongjae, Moon, Jinok, Lee, Kangchun, Yi, Dong Kee, Paik, Ungyu
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
Get full text
Journal Article
Highly Dispersed Fe 3+ -Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization
Kim, Kijung, Seo, Jihoon, Lee, Myeongjae, Moon, Jinok, Lee, Kangchun, Yi, Dong Kee, Paik, Ungyu
Published in ECS journal of solid state science and technology (2017)
Published in ECS journal of solid state science and technology (2017)
Get full text
Journal Article