E-Beam Hot Spot Inspection for Early Detection of Systematic Patterning Problems for a 22 nm SOI Technology
Patterson, Oliver D., Ryan, Deborah A., Monkowski, Michael D., Nguyen-Ngoc, Dominique, Morgenfeld, Bradley, Chung-Han Lee, Chieh-Hung Liu, Chi-Ming Chan, Shih-Tsung Chen, Lei, Shuen-Cheng Chris
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
Published in IEEE transactions on semiconductor manufacturing (01.11.2014)
Get full text
Journal Article
Junction Leakage due to RIE‐Induced Metallic Contamination
Gambino, J. P., Monkowski, M. D., Shepard, J. F., Parks, C. C.
Published in Journal of the Electrochemical Society (01.03.1990)
Published in Journal of the Electrochemical Society (01.03.1990)
Get full text
Journal Article
Chloride ion penetration of passive films on iron
MURPHY, O. J, BOCKRIS, J. O. M, POU, T. E, TONGSON, L. L, MONKOWSKI, M. D
Published in Journal of the Electrochemical Society (01.08.1983)
Published in Journal of the Electrochemical Society (01.08.1983)
Get full text
Journal Article
PtSi-induced junction leakage
GAMBINO, J. P, MONKOWSKI, M. D, TSANG, P. J, SHEPARD, J. F, RANSOM, C. M, WONG, C. Y
Published in Journal of the Electrochemical Society (01.07.1989)
Published in Journal of the Electrochemical Society (01.07.1989)
Get full text
Journal Article
DEEP PERONEAL NERVE: AN ANATOMICAL REVIEW
Bollini, C. A., Egidi, R., Monkowski, D.
Published in Regional anesthesia and pain medicine (01.05.1999)
Published in Regional anesthesia and pain medicine (01.05.1999)
Get full text
Journal Article
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
Patterson, Oliver D., Ryan, Deborah A., Monkowski, Mike D., Nguyen-ngoc, Dominique, Morgenfeld, Bradley, Chung-ham Lee, Chieh-hung Liu, Chi-ming Chen, Shih-tsung Chen
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Get full text
Conference Proceeding