Machine Learning Approaches for Process Optimization
Suzuki, Yusuke, Iwashita, Shinya, Sato, Toshiki, Yonemichi, Hitoshi, Moki, Hironori, Moriya, Tsuyoshi
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
Optimization of uniformity in plasma ashing process using genetic programming
Moriya, Tsuyoshi, Suzuki, Yusuke, Yonemichi, Hitoshi, Moki, Hironori
Published in Journal of physics. D, Applied physics (31.08.2023)
Published in Journal of physics. D, Applied physics (31.08.2023)
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Journal Article
데이터 수집 시스템, 데이터 수집 장치, 데이터 수집 방법 및 데이터 수집 프로그램
MOKI HIRONORI, MATSUZAWA TAKAHITO, KATAOKA YUKI, UOYAMA KAZUYA, MORIYA TSUYOSHI
Year of Publication 30.10.2023
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Year of Publication 30.10.2023
Patent
관리 장치, 예측 방법 및 예측 프로그램
MOKI HIRONORI, KATAOKA YUKI, MATSUZAWA TAKAHITO, UOYAMA KAZUYA, MORIYA TSUYOSHI
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
Patent
관리 시스템, 관리 방법 및 관리 프로그램
MOKI HIRONORI, KATAOKA YUKI, MATSUZAWA TAKAHITO, UOYAMA KAZUYA, MORIYA TSUYOSHI
Year of Publication 25.08.2023
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Year of Publication 25.08.2023
Patent
DATA COLLECTION SYSTEM, DATA COLLECTION DEVICE, DATA COLLECTION METHOD, AND DATA COLLECTION PROGRAM
MOKI, Hironori, MATSUZAWA, Takahito, KATAOKA, Yuki, UOYAMA, Kazuya, MORIYA, Tsuyoshi
Year of Publication 09.09.2022
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Year of Publication 09.09.2022
Patent
MANAGEMENT DEVICE, PREDICTION METHOD, AND PREDICTION PROGRAM
MOKI, Hironori, MATSUZAWA, Takahito, KATAOKA, Yuki, UOYAMA, Kazuya, MORIYA, Tsuyoshi
Year of Publication 07.07.2022
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Year of Publication 07.07.2022
Patent
MANAGEMENT SYSTEM, MANAGEMENT METHOD, AND MANAGEMENT PROGRAM
MOKI, Hironori, MATSUZAWA, Takahito, KATAOKA, Yuki, UOYAMA, Kazuya, MORIYA, Tsuyoshi
Year of Publication 30.06.2022
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Year of Publication 30.06.2022
Patent