Kinetics of boron activation
Mokhberi, A., Griffin, P.B., Plummer, J.D.
Published in 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) (2000)
Published in 2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) (2000)
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Conference Proceeding
A comparative study of dopant activation in boron, BF2, arsenic, and phosphorus implanted silicon
Mokhberi, A, Griffin, P.B, Plummer, J.D, Paton, E, McCoy, S, Elliott, K
Published in IEEE transactions on electron devices (01.07.2002)
Published in IEEE transactions on electron devices (01.07.2002)
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Journal Article
Atomistic modeling of B activation and deactivation for ultra-shallow junction formation
Aboy, M., Pelaz, L., Marques, L.A., Barbolla, J., Mokhberi, A., Takamura, Y., Griffin, P.B., Plummer, J.D.
Published in International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003 (2003)
Published in International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003 (2003)
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Conference Proceeding
A comparative study of dopant activation in boron, BF(2), arsenic, and phosphorus implanted silicon
Mokhberi, A, Griffin, P B, Plummer, J D, Paton, E, McCoy, S, Elliott, K
Published in IEEE transactions on electron devices (01.07.2002)
Published in IEEE transactions on electron devices (01.07.2002)
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Journal Article
A physics based approach to ultra-shallow p/sup +/-junction formation at the 32 nm node
Mokhberi, A., Pelaz, L., Aboy, M., Marques, L., Barbolla, J., Paton, E., McCoy, S., Ross, J., Elliott, K., Gelpey, J., Griffin, P.B., Plummer, J.D.
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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Conference Proceeding
A physics based approach to ultra-shallow p+-junction formation at the 32nm node
MOKHBERI, Ali, PELAZ, Lourdes, GRIFFIN, Peter B, PLUMMER, James D, ABOY, Maria, MARQUES, Luis, BARBOLLA, Juan, PATON, Eric, MCCOY, Steve, ROSS, Jonathan, ELLIOTT, Kiefer, GELPEY, Jeffrey
Year of Publication 2002
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Year of Publication 2002
Conference Proceeding