Electrical interconnection in anodic bonding of silicon wafer to LTCC wafer using highly compliant porous bumps made from submicron gold particles
Tanaka, Shuji, Mohri, Mamoru, Ogashiwa, Toshinori, Fukushi, Hideyuki, Tanaka, Katsunao, Nakamura, Daisuke, Nishimori, Takashi, Esashi, Masayoshi
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
Get full text
Journal Article
MEMS Wafer-Level Packaging Technology Using LTCC Wafer
Mohri, Mamoru, Esashi, Masayoshi, Tanaka, Shuji
Published in Electronics and communications in Japan (01.09.2014)
Published in Electronics and communications in Japan (01.09.2014)
Get full text
Journal Article
Wafer-level hermetic packaging technology for MEMS using anodically-bondable LTCC wafer
Tanaka, S, Matsuzaki, S, Mohri, M, Okada, A, Fukushi, H, Esashi, M
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01.01.2011)
Published in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (01.01.2011)
Get full text
Conference Proceeding
Electrical connection using submicron porous gold bumps for wafer-level packaging of mems using anodically-bondable LTCC wafer
Tanaka, S., Mohri, M., Ogashiwa, T., Fukushi, H., Tanaka, K., Nakamura, D., Nisimori, T., Esashi, M.
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Get full text
Conference Proceeding
Surface compositional changes of TiC, B4C and SiC at high temperatures
Get full text
Conference Proceeding
Journal Article
Human space exploration – A global trans-cultural quest
Avdeyev, Sergey, Clervoy, Jean-Francois, Comtois, Jean-Marc, Doi, Takao, Hoffman, Jeffrey, Mohri, Mamoru, Thiele, Gerhard
Published in Space policy (01.02.2011)
Published in Space policy (01.02.2011)
Get full text
Journal Article
SiC coatings for first-wall candidate materials by R.F. sputtering
Hirohata, Yuhko, Kobayashi, Masashi, Maeda, Shigeru, Nakamura, Kazuyuki, Mohri, Mamoru, Watanabe, Kuniaki, Yamashina, Toshiro
Published in Thin solid films (01.11.1979)
Published in Thin solid films (01.11.1979)
Get full text
Journal Article