Mixed-ligand zinc-oxoclusters: efficient chemistry for high resolution nanolithography
Thakur, Neha, Bliem, Roland, Mochi, Iacopo, Vockenhuber, Michaela, Ekinci, Yasin, Castellanos, Sonia
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
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Journal Article
Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror
Yuan, Sheng, Goldberg, Kenneth A., Yashchuk, Valeriy V., Celestre, Richard, McKinney, Wayne R., Morrison, Gregory, Macdougall, James, Mochi, Iacopo, Warwick, Tony
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.01.2011)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.01.2011)
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Journal Article
Extreme ultraviolet lithography reaches 5 nm resolution
Giannopoulos, Iason, Mochi, Iacopo, Vockenhuber, Michaela, Ekinci, Yasin, Kazazis, Dimitrios
Published in Nanoscale (22.08.2024)
Published in Nanoscale (22.08.2024)
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Journal Article
Recovery of spatial frequencies in coherent diffraction imaging in the presence of a central obscuration
Dejkameh, Atoosa, Nebling, Ricarda, Locans, Uldis, Kim, Hyun-Su, Mochi, Iacopo, Ekinci, Yasin
Published in Ultramicroscopy (01.04.2024)
Published in Ultramicroscopy (01.04.2024)
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Journal Article
Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source
Yamazoe, Kenji, Mochi, Iacopo, Goldberg, Kenneth A
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.12.2014)
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.12.2014)
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Journal Article
Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging
Helfenstein, Patrick, Rajeev, Rajendran, Mochi, Iacopo, Kleibert, Armin, Vaz, C A F, Ekinci, Yasin
Published in Optics express (30.04.2018)
Published in Optics express (30.04.2018)
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Journal Article
Ptychographic image reconstruction using total variation regularization
Nebling, Ricarda, Mochi, Iacopo, Kim, Hyunsu, Dejkameh, Atoosa, Shen, Tao, Guizar-Sicairos, Manuel, Ekinci, Yasin
Published in Acta crystallographica. Section A, Foundations and advances (14.08.2021)
Published in Acta crystallographica. Section A, Foundations and advances (14.08.2021)
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Journal Article
Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurability
Gottlieb, Steven, Kazazis, Dimitrios, Mochi, Iacopo, Evangelio, Laura, Fernández-Regúlez, Marta, Ekinci, Yasin, Perez-Murano, Francesc
Published in Soft matter (2018)
Published in Soft matter (2018)
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Journal Article
Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurabilityElectronic supplementary information (ESI) available. See DOI: 10.1039/c8sm01045e
Gottlieb, Steven, Kazazis, Dimitrios, Mochi, Iacopo, Evangelio, Laura, Fernández-Regúlez, Marta, Ekinci, Yasin, Perez-Murano, Francesc
Year of Publication 22.08.2018
Year of Publication 22.08.2018
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Journal Article
Coherent diffractive imaging methods for semiconductor manufacturing
Helfenstein, Patrick, Mochi, Iacopo, Rajeev, Rajendran, Fernandez, Sara, Ekinci, Yasin
Published in Advanced optical technologies (20.12.2017)
Published in Advanced optical technologies (20.12.2017)
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Journal Article
Optical modeling of Fresnel zoneplate microscopes
Naulleau, Patrick P, Mochi, Iacopo, Goldberg, Kenneth A
Published in Applied optics. Optical technology and biomedical optics (10.07.2011)
Published in Applied optics. Optical technology and biomedical optics (10.07.2011)
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Journal Article
In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer
Merthe, Daniel J., Goldberg, Kenneth A., Yashchuk, Valeriy V., McKinney, Wayne R., Celestre, Richard, Mochi, Iacopo, MacDougall, James, Morrison, Gregory Y., Rekawa, Senajith B., Anderson, Erik, Smith, Brian V., Domning, Edward E., Padmore, Howard
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2013)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.05.2013)
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Journal Article
Extreme ultraviolet lithography reaches 5 nm resolution
Giannopoulos, Iason, Mochi, Iacopo, Vockenhuber, Michaela, Ekinci, Yasin, Kazazis, Dimitrios
Published in arXiv.org (28.02.2024)
Published in arXiv.org (28.02.2024)
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Journal Article
Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE
Sacchi, Sara, Dey, Bappaditya, Mochi, Iacopo, Halder, Sandip, Leray, Philippe
Published in arXiv.org (23.10.2023)
Published in arXiv.org (23.10.2023)
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Journal Article
Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks
Brizuela, Fernando, Carbajo, Sergio, Sakdinawat, Anne, Alessi, David, Martz, Dale H, Wang, Yong, Luther, Bradley, Goldberg, Kenneth A, Mochi, Iacopo, Attwood, David T, La Fontaine, Bruno, Rocca, Jorge J, Menoni, Carmen S
Published in Optics express (05.07.2010)
Published in Optics express (05.07.2010)
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Journal Article
Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror
Yuan, Sheng Sam, Goldberg, Kenneth A., Yashchuk, Valeriy V., Celestre, Richard, McKinney, Wayne R., Morrison, Gregory, Macdougall, James, Mochi, Iacopo, Warwick, Tony
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (15.09.2010)
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Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (15.09.2010)
Journal Article
Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks
Brizuela, Fernando, Carbajo, Sergio, Sakdinawat, Anne, Alessi, David, Martz, Dale H., Wang, Yong, Luther, Bradley, Goldberg, Kenneth A., Mochi, Iacopo, Attwood, David T., La Fontaine, Bruno, Rocca, Jorge J., Menoni, Carmen S.
Published in Optics express (2010)
Published in Optics express (2010)
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Journal Article