GALLIUM NITRIDE SUBSTRATE AND MANUFACTURING METHOD OF NITRIDE SEMICONDUCTOR CRYSTAL
MlKAWA Yutaka, TSUKADA Yusuke, IKEDA Hirotaka, KAMADA Kazunori, FUJISAWA Hideo, MATSUMOTO Hajime, KUBO Shuichi, OHATA Tatsuhiro
Year of Publication 13.07.2017
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Year of Publication 13.07.2017
Patent