Test Structure of Bi-stable Spring towards TopoMEMS Ising Machine
Mita, Yoshio, Ezawa, Motohiko, Tsuji, Keigo, Lebrasseur, Eric, Sawamura, Tomoki, Tsuboi, Shinji, Mizushima, Ayako, Ochiai, Yukinori, Higo, Akio
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
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Conference Proceeding
Test structure for electrical assessment of UV laser direct fine patterned material
Usami, Naoto, Higo, Akio, Mizushima, Ayako, Okamoto, Yuki, Mita, Yoshio
Published in 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) (01.03.2018)
Published in 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) (01.03.2018)
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Conference Proceeding
A Micro Racetrack Optical Resonator Test Structure to Optimize Pattern Approximation in Direct Lithography Technologies
Higo, Akio, Sawamura, Tomoki, Fujiwara, Makoto, Ota, Etsuko, Mizushima, Ayako, Lebrasseur, Eric, Arakawa, Taro, Mita, Yoshio
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
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Conference Proceeding
Mobile microrobotic cleaner in microfluidics
Hwang, Gilgueng, Mizushima, Ayako, Lebrasseur, Eric, Misumi, Kei, Usami, Naoto, Higo, Akio, Mita, Yoshio
Published in Sensors and actuators. A. Physical. (01.02.2021)
Published in Sensors and actuators. A. Physical. (01.02.2021)
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Journal Article
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications
Hwang, Gilgueng, David, Christophe, Paris, Alisier, Decanini, Dominique, Mizushima, Ayako, Mita, Yoshio
Published in IEEE transactions on semiconductor manufacturing (01.08.2021)
Published in IEEE transactions on semiconductor manufacturing (01.08.2021)
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Journal Article
Test Structure to Assess Bump Shape Influence on Hybrid Bonding
Mizushima, Ayako, Misumi, Kei, Yasunaga, Shun, Higo, Akio, Nakane, Ryosho, Tsumura, Kazumichi, Higashi, Kazuyuki, Ochiai, Yukinori, Mita, Yoshio
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
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Conference Proceeding
Two-pads per electrode in-situ test structure for micron-scale flip-chip bonding reliability of chip-on-chip device
Ebihara, Yusuke, Mizushima, Ayako, Yoda, Takashi, Hirakawa, Kenji, Iwase, Masayuki, Ogasawara, Munehiro, Higo, Akio, Ochiai, Yukinori, Mita, Yoshio
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
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Conference Proceeding
An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform
Yasunaga, Shun, Misumi, Kei, Mizushima, Ayako, Toyokura, Atsushi, Ota, Etsuko, Inoue, Yurie, Fujiwara, Makoto, Kawai, Noriko, Yoda, Mitsuhiro, Tsuboi, Shinji, Sawamura, Tomoki, Higo, Akio, Nakane, Ryosho, Ochiai, Yukinori, Mita, Yoshio
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
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Conference Proceeding
Single-shot optical imaging with spectrum circuit bridging timescales in high-speed photography
Saiki, Takao, Shimada, Keitaro, Ishijima, Ayumu, Song, Hang, Qi, Xinyi, Okamoto, Yuki, Mizushima, Ayako, Mita, Yoshio, Hosobata, Takuya, Takeda, Masahiro, Morita, Shinya, Kushibiki, Kosuke, Ozaki, Shinobu, Motohara, Kentaro, Yamagata, Yutaka, Tsukamoto, Akira, Kannari, Fumihiko, Sakuma, Ichiro, Inada, Yuki, Nakagawa, Keiichi
Published in Science advances (22.12.2023)
Published in Science advances (22.12.2023)
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Journal Article
A Rapid, Reliable and Less-destructive On-chip Mass Measurement for 3D Composite Material Testing Microstructures
Hwang, Gilgueng, David, Christophe, Paris, Alisier, Decanini, Dominique, Mizushima, Ayako, Mita, Yoshio
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
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Conference Proceeding
Damage Assessment Structure of Test-Pad Post-Processing on CMOS LSIs
Okamoto, Yuki, Mizushima, Ayako, Usami, Naoto, Kinoshita, Jun, Higo, Akio, Mita, Yoshio
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
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Conference Proceeding
Novel Fabrication of 4D Printed Optical Probe Array with Nanometer Aperture and Optical Spot Size Tunning
Decanini, Dominique, Harouri, Abdelmounaim, Mizushima, Ayako, Park, Jongho, Kim, Beomjoon, Mita, Yoshio, Hwang, Gilgueng
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
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Conference Proceeding
3D Printed Miniaturized Soft Microswimmer for Multimodal 3D Air-Liquid Navigation and Manipulation
Decanini, Dominique, Harouri, Abdelmounaim, Mizushima, Ayako, Kim, Beomjoon, Mita, Yoshio, Hwang, Gilgueng
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)
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Conference Proceeding
Operation of Arrayed Logic Elements for Mems Ising Machine
Yasunaga, Shun, Ezawa, Motohiko, Tsuji, Keigo, Misumi, Kei, Sawamura, Tomoki, Tsuboi, Shinji, Mizushima, Ayako, Ochiai, Yukinori, Higo, Akio, Mita, Yoshio
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
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Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Conference Proceeding
A Bimodal "Sensor Chiplet" Platform Applied for Albumin and pH Multi-Chemical Sensing
Shimamura, Ryugo, Yasunaga, Shun, Misumi, Kei, Eiler, Anne-Claire, Higo, Akio, Hwang, Gilgueng, Mizushima, Ayako, Zhu, Dongchen, Komori, Kikuo, Sakai, Yasuyuki, Toshiyoshi, Hiroshi, Tixier-Mita, Agnes, Mita, Yoshio
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
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Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Conference Proceeding
Two-Dimensionally Arrayed Double-Layer Electrode Device Which Enables Reliable and High-Thoroughput Electrortation
Tsuchiya, Taku, Okamoto, Yuki, Marty, Frederic, Mizushima, Ayako, Tixier-Mita, Agnes, Francais, Olivier, Le Pioufle, Bruno, Mita, Yoshio
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
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Conference Proceeding