A comprehensive "big-data-based" monitoring system for yield enhancement in semiconductor man ufacturing
Nakata, Kouta, Orihara, Ryohei, Mizuoka, Yoshiaki, Takagi, Kentaro
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)
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