Development of Cellulose Derivative Mold for Imprint Lithography
Kurematsu, Kazuho, Takei, Satoshi, Mizui, Kento, Hanabata, Makoto
Published in Journal of Photopolymer Science and Technology (24.06.2019)
Published in Journal of Photopolymer Science and Technology (24.06.2019)
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Journal Article
Improvement of Gas Permeability of Gas Permeable Mold with Lattice Structure for Reduction of Transfer Failure in Photoimprint Lithography
Sugino, Naoto, Kurematsu, Kazuho, Mizui, Kento, Hanabata, Makoto, Takei, Satoshi
Published in Journal of Photopolymer Science and Technology (24.06.2019)
Published in Journal of Photopolymer Science and Technology (24.06.2019)
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Journal Article
Reduction of Defect for Imprinted UV Curable Resin including Volatile Solvents using Gas Permeable Mold Derived from Cellulose
Mizui, Kento, Kurematsu, Kazuho, Nakajima, Shinya, Hanabata, Makoto, Takei, Satoshi
Published in Journal of Photopolymer Science and Technology (25.06.2018)
Published in Journal of Photopolymer Science and Technology (25.06.2018)
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Journal Article
The Photopolymer Science and Technology Award
Takei, Satoshi, Hanabata, Makoto, Mizui, Kento, Kurematsu, Kazuho, Nakajima, Shinya
Published in Journal of Photopolymer Science and Technology (24.06.2019)
Published in Journal of Photopolymer Science and Technology (24.06.2019)
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Journal Article
Comparison of gas permeable mold with acryl substituents for silver nano-paste imprint patterning
Kurematsu, Kazuho, Takei, Satoshi, Nakajima, Shinya, Mizui, Kento, Takamatsu, Soichiro, Hirata, Daiki, Hanabata, Makoto
Published in Microelectronic engineering (15.08.2019)
Published in Microelectronic engineering (15.08.2019)
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Journal Article
Gas-permeable templates using cellulose derivatives with acrylate and methacrylate groups for reducing in void defect density in ultraviolet nanoimprint lithography
Nakajima, Shinya, Takei, Satoshi, Takamatsu, Soichiro, Mizui, Kento, Oka, Toshitaka, Matsumoto, Yoko, Sekiguchi, Atsushi, Hanabata, Makoto
Published in Japanese Journal of Applied Physics (01.08.2018)
Published in Japanese Journal of Applied Physics (01.08.2018)
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Journal Article