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"Miyazawa Masakuni"
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"Miyazawa Masakuni"
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SUBSTRATE FIXING DEVICE AND ELECTROSTATIC CHUCK
by
MIYAZAWA MASAKUNI
Year of Publication
26.03.2021
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SUBSTRATE FIXING DEVICE
by
MIYAZAWA MASAKUNI
Year of Publication
25.03.2021
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ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
by
MIYAZAWA MASAKUNI
,
WATANABE MIZUKI
,
INOUE TOMOHIRO
Year of Publication
14.02.2023
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ELECTROSTATIC CHUCK AND SUBSTRATE HOLDING DEVICE
by
MIYAZAWA MASAKUNI
,
WATANABE MIZUKI
,
INOUE TOMOHIRO
Year of Publication
09.02.2023
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SINTERED BODY METHOD OF MANUFACTURING THE SAME AND ELECTROSTATIC CHUCK
by
HORIUCHI MICHIO
,
MIYAZAWA MASAKUNI
Year of Publication
19.12.2017
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SINTERED BODY, MANUFACTURING METHOD THEREFOR AND ELECTROSTATIC CHUCK
by
HORIUCHI MICHIO
,
MIYAZAWA MASAKUNI
Year of Publication
14.12.2017
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ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
by
MIYAMOTO KAZUYOSHI
,
MIYAZAWA MASAKUNI
Year of Publication
20.11.2014
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ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING DEVICE
by
MIYAMOTO KAZUYOSHI
,
MIYAZAWA MASAKUNI
Year of Publication
19.11.2014
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ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
by
SHIMIZU KAZUNORI
,
MIYAMOTO KAZUYOSHI
,
MIYAZAWA MASAKUNI
Year of Publication
08.06.2017
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SUBSTRATE FIXING DEVICE AND ELECTROSTATIC CHUCK
by
MIYAZAWA
,
Masakuni
Year of Publication
18.03.2021
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TWI849222B
by
MIYAZAWA
,
MASAKUNI
Year of Publication
21.07.2024
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Sintered body and electrostatic chuck
by
Horiuchi, Michio
,
Miyazawa
,
Masakuni
Year of Publication
04.05.2021
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Electrostatic chuck and substrate holding device
by
Watanabe, Mizuki
,
Inoue, Tomohiro
,
Miyazawa
,
Masakuni
Year of Publication
26.03.2024
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ELECTROSTATIC CHUCK AND SUBSTRATE HOLDING DEVICE
by
MIYAZAWA
,
Masakuni
,
WATANABE, Mizuki
,
INOUE, Tomohiro
Year of Publication
02.02.2023
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Substrate fixing device and electrostatic chuck
by
MIYAZAWA
,
MASAKUNI
Year of Publication
01.04.2021
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SUBSTRATE FIXING DEVICE
by
MIYAZAWA MASAKUNI
Year of Publication
19.03.2021
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SINTERED BODY AND ELECTROSTATIC CHUCK
by
Horiuchi Michio
,
Miyazawa Masakuni
Year of Publication
14.12.2017
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Sintered body, method of manufacturing the same, and electrostatic chuck
by
MIYAZAWA
,
MASAKUNI
,
HORIUCHI, MICHIO
Year of Publication
01.03.2022
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Electrostatic chuck and semiconductor manufacturing device
by
Miyamoto Kazuyoshi
,
Miyazawa Masakuni
Year of Publication
16.08.2016
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ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING DEVICE
by
MIYAMOTO KAZUYOSHI
,
MIYAZAWA MASAKUNI
Year of Publication
13.11.2014
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