Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering
Sato, Yasushi, Taketomo, Mikihiro, Ito, Norihiro, Miyamura, Amica, Shigesato, Yuzo
Published in Thin solid films (30.05.2008)
Published in Thin solid films (30.05.2008)
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Conference Proceeding
Thermophysical properties of aluminum oxide and molybdenum layered films
Oka, Nobuto, Arisawa, Ryo, Miyamura, Amica, Sato, Yasushi, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo
Published in Thin solid films (31.03.2010)
Published in Thin solid films (31.03.2010)
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High Rate Reactive Sputter Deposition of TiO2 Films for Photocatalyst and Dye-Sensitized Solar Cells
Sato, Yasushi, Hashimoto, Takahiro, Miyamura, Amica, Ohno, Singo, Oka, Nobuto, Suzuki, Koichi, Glö${\ss}$, Daniel, Frach, Peter, Shigesato, Yuzo
Published in Jpn J Appl Phys (01.04.2011)
Published in Jpn J Appl Phys (01.04.2011)
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サーモリフレクタンス法による TiNx 薄膜の熱拡散率の測定
大塚, 徹郎, 宮村, 会実佳, 佐藤, 泰史, 重里, 有三, 八木, 貴志, 竹歳, 尚之, 馬場, 哲也
Published in Journal of the Vacuum Society of Japan (2008)
Published in Journal of the Vacuum Society of Japan (2008)
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Journal Article
High Rate Reactive Sputter Deposition of TiO 2 Films for Photocatalyst and Dye-Sensitized Solar Cells
Sato, Yasushi, Hashimoto, Takahiro, Miyamura, Amica, Ohno, Singo, Oka, Nobuto, Suzuki, Koichi, Glöß, Daniel, Frach, Peter, Shigesato, Yuzo
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
High Rate Reactive Sputter Deposition of TiO 2 Films for Photocatalyst and Dye-Sensitized Solar Cells
Sato, Yasushi, Hashimoto, Takahiro, Miyamura, Amica, Ohno, Singo, Oka, Nobuto, Suzuki, Koichi, Glöß, Daniel, Frach, Peter, Shigesato, Yuzo
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article