EUV sources using Xe and Sn discharge plasmas
Borisov, Vladimir M, Eltsov, Aleksander V, Ivanov, Aleksander S, Kiryukhin, Yuriy B, Khristoforov, Oleg B, Mishchenko, Valentin A, Prokofiev, Aleksander V, Yu Vinokhodov, Aleksander, Vodchits, Vladimir A
Published in Journal of physics. D, Applied physics (07.12.2004)
Published in Journal of physics. D, Applied physics (07.12.2004)
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Journal Article
High-power EUV (13.5 nm) light source
Borisov, Vladimir M, Borisova, Galina N, Vinokhodov, Aleksandr Yu, Zakharov, S V, Ivanov, Aleksandr S, Kiryukhin, Yurii B, Mishchenko, Valentin A, Prokof'ev, Aleksandr V, Khristoforov, Oleg B
Published in Quantum electronics (Woodbury, N.Y.) (15.10.2010)
Published in Quantum electronics (Woodbury, N.Y.) (15.10.2010)
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Journal Article
EUV sources using Xe and Sn discharge plasmas : Special cluster on extreme ultraviolet light sources for semiconductor manufacturing
BORISOV, Vladimir M, ELTSOV, Aleksander V, IVANOV, Aleksander S, KIRYUKHIN, Yuriy B, KHRISTOFOROV, Oleg B, MISHCHENKO, Valentin A, PROKOFIEV, Aleksander V, VINOKHODOV, Aleksander Yu, VODCHITS, Vladimir A
Published in Journal of physics. D, Applied physics (2004)
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Published in Journal of physics. D, Applied physics (2004)
Journal Article
CRAY CODE-TO-BINARY CODE TRANSLATOR
MISHCHENKO VALENTIN A,SU, GERTSEV VLADIMIR A,SU, LAZAREVICH EDUARD G,SU
Year of Publication 23.01.1985
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Year of Publication 23.01.1985
Patent
THREE-INPUT PARALLEL ADDER
GURYANOV ANATOLIJ V,SU, VITER VLADIMIR V,SU, MISHCHENKO VALENTIN A,SU
Year of Publication 23.01.1985
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Year of Publication 23.01.1985
Patent
DEVICE FOR COMPUTING VALUES OF LOGICAL EXPRESSIONS OF N VARIABLES
BOBKOV VLADIMIR A,SU, KOZYUMINSKIJ VALERIJ D,SU, MISHCHENKO VALENTIN A,SU
Year of Publication 15.10.1984
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Year of Publication 15.10.1984
Patent
DEVICE FOR COMPUTING VALUES OF LOGIC EXPRESSIONS WITH N VARIABLES
GURYANOV ANATOLIJ V,SU, KOZYUMINSKIJ VALERIJ D,SU, MISHCHENKO VALENTIN A,SU
Year of Publication 07.04.1984
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Year of Publication 07.04.1984
Patent