High precision forming of masking coatings of X-ray masks directly on the membranes
Korsakov, V.S, Mazurenko, S.N, Mishachov, V.I, Trutnev, N.F
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.1995)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.1995)
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