On the target surface temperature during dc magnetron sputtering
Shaginyan, Leonid R., Shaginyan, Vasily R., Kuzmichev, Anatoly I., Mironov, Mikhail I.
Published in European physical journal. Applied physics (01.10.2020)
Published in European physical journal. Applied physics (01.10.2020)
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Journal Article
Variations in composition and structure occurring in multicomponent alloy targets during their service term
Shaginyan, Leonid R., Mironov, Mikhail I., Firstov, Sergey A., Krapivka, Nicolay A., Kremenitsky, Valery V., Novichenko, Viktor N.
Published in European physical journal. Applied physics (09.01.2023)
Published in European physical journal. Applied physics (09.01.2023)
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