PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
CHANDRASEKHARAN RAMESH, BREILING PATRICK, BALDASSERONI CHLOE, PASQUALE FRANK, KONKOLA PAUL, LEESER KARL, KIM SUNG JE, KARIM ISHTAK, MINSHALL EDMUND, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 01.12.2023
Get full text
Year of Publication 01.12.2023
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
CHANDRASEKHARAN RAMESH, BREILING PATRICK, BALDASSERONI CHLOE, PASQUALE FRANK, KONKOLA PAUL, LEESER KARL, KIM SUNG JE, KARIM ISHTAK, MINSHALL EDMUND, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 17.08.2022
Get full text
Year of Publication 17.08.2022
Patent
WAFER CENTERING IN POCKET TO IMPROVE AZIMUTHAL THICKNESS UNIFORMITY AT WAFER EDGE
CHANDRASEKHARAN RAMESH, PASQUALE FRANK L, MINSHALL EDMUND B, BALDASSERONI CHLOE, SWAMINATHAN SHANKAR
Year of Publication 31.01.2018
Get full text
Year of Publication 31.01.2018
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
CHANDRASEKHARAN RAMESH, BREILING PATRICK, BALDASSERONI CHLOE, PASQUALE FRANK, KONKOLA PAUL, LEESER KARL, KIM SUNG JE, KARIM ISHTAK, MINSHALL EDMUND, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 09.05.2018
Get full text
Year of Publication 09.05.2018
Patent
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING
CHANDRASEKHARAN RAMESH, KANG HU, KUMAR PURUSHOTTAM, SMITH DAVID C, BALDASSERONI CHLOE, VARADARAJAN SESHASAYEE, SABRI MOHAMED, LEESER KARL, MINSHALL EDMUND B, DUVALL ANDREW, LAVOIE ADRIEN, QIAN JUN, BARNETT CODY
Year of Publication 11.03.2016
Get full text
Year of Publication 11.03.2016
Patent
Planar substrate edge contact with open volume equalization pathways and side containment
Duvall, Andrew, Breiling, Patrick, Karim, Ishtak, Chandrasekharan, Ramesh, LaVoie, Adrien, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 13.09.2022
Get full text
Year of Publication 13.09.2022
Patent
Method and apparatus for rapid pump-down of a high-vacuum loadlock
Morris, Victor F, Powell, Ronald A, Minshall, Edmund B, Charan, Ram, Khosla, Mukul
Year of Publication 30.10.2018
Get full text
Year of Publication 30.10.2018
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
Duvall, Andrew, Breiling, Patrick, Karim, Ishtak, Chandrasekharan, Ramesh, LaVoie, Adrien, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 16.07.2020
Get full text
Year of Publication 16.07.2020
Patent
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION
Duvall, Andrew, Chandrasekharan, Ramesh, LaVoie, Adrien, BREILING, Patrick, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Karim, lshtak, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 09.07.2020
Get full text
Year of Publication 09.07.2020
Patent
Planar substrate edge contact with open volume equalization pathways and side containment
Duvall, Andrew, Breiling, Patrick, Karim, Ishtak, Chandrasekharan, Ramesh, LaVoie, Adrien, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 14.04.2020
Get full text
Year of Publication 14.04.2020
Patent
PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED PRESSURE
Chandrasekharan Ramesh, Minshall Edmund, Leeser Karl, Duvall Andrew, Breiling Patrick Girard, Smith Colin
Year of Publication 14.09.2017
Get full text
Year of Publication 14.09.2017
Patent
Plasma suppression behind a showerhead through the use of increased pressure
Chandrasekharan Ramesh, Minshall Edmund, Leeser Karl, Duvall Andrew, Breiling Patrick Girard, Smith Colin
Year of Publication 12.09.2017
Get full text
Year of Publication 12.09.2017
Patent
Balanced pathway and side seal for flat substrate edge to open volume contact
KARIM, ISTAK, PASQUALE FRANK, KONKOLA PAUL, KIM SUNG-JAE, LEESER KARL, BALDASSERONI, CHLOE, MINSHALL EDMUND, CHANDRASEHARAN, RAMESH, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, BREILINGER, PATRICK, LAVOIE ADRIEN
Year of Publication 10.11.2023
Get full text
Year of Publication 10.11.2023
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
Adrien LaVoie, Chloe Baldasseroni, lshtak KARIM, Ramesh CHANDRASEKHARAN, Sung Je KIM, Paul KONKOLA, Shankar SWAMINATHAN, Patrick BREILING, Edmund MINSHALL, Andrew DUVALL, Yukinori Sakiyama, Frank PASQUALE, Karl LEESER
Year of Publication 30.05.2018
Get full text
Year of Publication 30.05.2018
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
Duvall, Andrew, Breiling, Patrick, Chandrasekharan, Ramesh, LaVoie, Adrien, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Karim, lshtak, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 03.05.2018
Get full text
Year of Publication 03.05.2018
Patent
Planar substrate edge contact with open volume equalization pathways and side containment
KARIM, ISHTAK, KIM, SUNG JE, LAVOIE, ADRIEN, BALDASSERONI, CHLOE, KONKOLA, PAUL, PASQUALE, FRANK, BREILING, PATRICK, LEESER, KARL, DUVALL, ANDREW, MINSHALL, EDMUND, CHANDRASEKHARAN, RAMESH, SAKIYAMA, YUKINORI, SWAMINATHAN, SHANKAR
Year of Publication 01.06.2022
Get full text
Year of Publication 01.06.2022
Patent
METHOD AND APPARATUS FOR RAPID PUMP-DOWN OF A HIGH-VACUUM LOADLOCK
MORRIS VICTOR F, POWELL RONALD A, CHARAN RAM, MINSHALL EDMUND B, KHOSLA MUKUL
Year of Publication 28.11.2013
Get full text
Year of Publication 28.11.2013
Patent
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW TEMPERATURE ALD SYSTEMS BY SHOWERHEAD ACTIVE HEATING AND/OR PEDESTAL COOLING
CHANDRASEKHARAN RAMESH, KANG HU, KUMAR PURUSHOTTAM, SMITH DAVID C, BALDASSERONI CHLOE, VARADARAJAN SESHASAYEE, SABRI MOHAMED, LEESER KARL F, MINSHALL EDMUND B, DUVALL ANDREW, LAVOIE ADRIEN, QIAN JUN, BARNETT CODY
Year of Publication 25.02.2016
Get full text
Year of Publication 25.02.2016
Patent