Microfabricated silicon solid immersion lens
Fletcher, D.A., Crozier, K.B., Guarini, K.W., Minne, S.C., Kino, G.S., Quate, C.F., Goodson, K.E.
Published in Journal of microelectromechanical systems (01.09.2001)
Published in Journal of microelectromechanical systems (01.09.2001)
Get full text
Journal Article
Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy
Grow, R.J., Minne, S.C., Manalis, S.R., Quate, C.F.
Published in Journal of microelectromechanical systems (01.08.2002)
Published in Journal of microelectromechanical systems (01.08.2002)
Get full text
Journal Article
Self-sensing tapping mode atomic force microscopy
Adams, J.D., Manning, L., Rogers, B., Jones, M., Minne, S.C.
Published in Sensors and actuators. A. Physical. (31.05.2005)
Published in Sensors and actuators. A. Physical. (31.05.2005)
Get full text
Journal Article
Piezoelectric self-sensing of adsorption-induced microcantilever bending
Adams, J.D., Rogers, B., Manning, L., Hu, Z., Thundat, T., Cavazos, H., Minne, S.C.
Published in Sensors and actuators. A. Physical. (30.06.2005)
Published in Sensors and actuators. A. Physical. (30.06.2005)
Get full text
Journal Article
Integration of through-wafer interconnects with a two-dimensional cantilever array
Chow, E.M, Soh, H.T, Lee, H.C, Adams, J.D, Minne, S.C, Yaralioglu, G, Atalar, A, Quate, C.F, Kenny, T.W
Published in Sensors and actuators. A. Physical. (22.05.2000)
Published in Sensors and actuators. A. Physical. (22.05.2000)
Get full text
Journal Article