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Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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RPS 퍼징을 가능하게 하기 위한 가스 혼합기
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Year of Publication 14.06.2023
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Year of Publication 14.06.2023
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Chamber components for gas delivery modulation
Tong, Mingle, Parimi, Venkata Sharat Chandra, Mings, Sherry L, Nguyen, Truong Van, Ruan, Fang, Kedlaya, Diwakar
Year of Publication 31.10.2023
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Year of Publication 31.10.2023
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Gas mixer to enable RPS purging
Ramamurthi, Badri N, Konnoth Joseph, Job George, Parimi, Venkata Sharat Chandra, Mings, Sherry L, Bansal, Amit, Ruan, Fang, Narayanan, Rajaram, Choudhury, Rupankar, Kedlaya, Diwakar
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
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CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION
TONG, Mingle, PARIMI, Venkata Sharat Chandra, RUAN, Fang, MINGS, Sherry L, KEDLAYA, Diwakar, NGUYEN, Truong Van
Year of Publication 14.05.2021
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Year of Publication 14.05.2021
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CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION
Tong, Mingle, Parimi, Venkata Sharat Chandra, Mings, Sherry L, Nguyen, Truong Van, Ruan, Fang, Kedlaya, Diwakar
Year of Publication 13.05.2021
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Year of Publication 13.05.2021
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GAS MIXER TO ENABLE RPS PURGING
Ramamurthi, Badri N, Konnoth Joseph, Job George, Parimi, Venkata Sharat Chandra, Mings, Sherry L, Bansal, Amit, Ruan, Fang, Narayanan, Rajaram, Choudhury, Rupankar, Kedlaya, Diwakar
Year of Publication 21.04.2022
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Year of Publication 21.04.2022
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GAS MIXER TO ENABLE RPS PURGING
RAMAMURTHI, Badri N, PARIMI, Venkata Sharat Chandra, RUAN, Fang, MINGS, Sherry L, KEDLAYA, Diwakar, BANSAL, Amit, JOSEPH, Job George Konnoth, CHOUDHURY, Rupankar, NARAYANAN, Rajaram
Year of Publication 21.04.2022
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Year of Publication 21.04.2022
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The effect of interfacial oxide and high-κ thickness on NMOS Vth shift from plasma-induced damage
Chih-Yang Chang, Jie Zhou, Chi-Nung Ni, Chan, Osbert, Shiyu Sun, Suen, Wesley, Mings, Sherry, Bevan, Malcolm, Liu, Patricia M., Hsieh, Peter, Chorng-Ping Chang, Hung, Raymond
Published in 2014 Silicon Nanoelectronics Workshop (SNW) (01.06.2014)
Published in 2014 Silicon Nanoelectronics Workshop (SNW) (01.06.2014)
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Conference Proceeding
Chamber components for gas delivery modulation
KEDLAYA, DIWAKAR, MINGS, SHERRY L, NGUYEN, TRUONG VAN, PARIMI, VENKATA SHARAT CHANDRA, RUAN, FANG, TONG, MINGLE
Year of Publication 11.11.2021
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Year of Publication 11.11.2021
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Gas mixer to enable RPS purging
KEDLAYA, DIWAKAR, MINGS, SHERRY L, CHOUDHURY, RUPANKAR, PARIMI, VENKATA SHARAT CHANDRA, NARAYANAN, RAJARAM, BANSAL, AMIT, RUAN, FANG, RAMAMURTHI, BADRI N, JOSEPH, JOB GEORGE KONNOTH
Year of Publication 01.08.2022
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Year of Publication 01.08.2022
Patent
Chamber components for gas delivery modulation
KEDLAYA, DIWAKAR, MINGS, SHERRY L, NGUYEN, TRUONG VAN, TONG, MING-LE, PARIMI, VENKATA SHARAT CHANDRA, RUAN, FANG
Year of Publication 01.07.2021
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Year of Publication 01.07.2021
Patent