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Year of Publication 27.12.2022
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PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD
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Year of Publication 28.10.2021
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UPPER SHIELD WITH SHOWERHEAD FOR A PROCESS CHAMBER
JUPUDI, ANANTHKRISHNA, ZHANG, KANG, OW, YUEH SHENG, WEI, JUNQI, BOH, KELVIN TAI MING, WADA, YUICHI, BABU, SARATH
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Year of Publication 01.12.2021
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UPPER SHIELD WITH SHOWERHEAD FOR A PROCESS CHAMBER
JUPUDI, ANANTHKRISHNA, ZHANG, KANG, OW, YUEH SHENG, WEI, JUNQI, BOH, KELVIN TAI MING, WADA, YUICHI, BABU, SARATH
Year of Publication 01.12.2021
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Year of Publication 01.12.2021
Patent
Preclean chamber upper shield with showerhead
JUPUDI, ANANTHKRISHNA, WEI, JUN-QI, ZHANG, KANG, OW, YUEH SHENG, BOH, KELVIN TAI MING, WADA, YUICHI, BABU, SARATH
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
Patent