Fabrication of sub-50-nm-gate i-AlGaN/GaN HEMTs on sapphire
Endoh, Akira, Yamashita, Yoshimi, Ikeda, Keiji, Higashiwaki, Masataka, Hikosaka, Kohki, Matsui, Toshiaki, Hiyamizu, Satoshi, Mimura1, Takashi
Published in Physica status solidi. C (01.12.2003)
Published in Physica status solidi. C (01.12.2003)
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