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Year of Publication 28.02.2013
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Year of Publication 10.05.2017
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Year of Publication 27.04.2017
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Year of Publication 09.03.2010
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Year of Publication 14.09.2005
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Year of Publication 28.02.2013
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Year of Publication 16.02.2005
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Year of Publication 08.02.2005
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Year of Publication 08.02.2005
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Small epicyclic magnetron with controlled radial sputtering profile
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Year of Publication 08.02.2005
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Year of Publication 08.02.2005
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