Process monitoring and control of low temperature reactively sputtered AlN
KIRKPATRICK, S. R, ROHDE, S. L, MIHUT, D. M, KURRUPPU, M. L, SWANSON, J. R, THOMSON, D, WOOLLAM, J. A
Published in Thin solid films (02.11.1998)
Published in Thin solid films (02.11.1998)
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