Preparation of Diamond-Like Carbon on Ti Film with Tetramethylsilane Buffer Layer
Kaneko, Satoru, Horiuchi, Takahiro, Ito, Takeshi, Takagi, Shin-ichi, Yasui, Manabu, Saitoh, Mitsuhiro, Matsunaga, Takashi, Ikenaga, Kaoru, Yasuhara, Shigeo, Mihirogi, Katsuhiro, Kobayashi, Masazumi, Kumagai, Masao, Shimodaira, Eiji, Sudo, Rieko
Published in Japanese Journal of Applied Physics (01.11.2013)
Published in Japanese Journal of Applied Physics (01.11.2013)
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Journal Article
Method of manufacturing FSi(OR)3
KISO; KOICHI, MIHIROGI; KATSUHIRO, MACHIDA; HIDEAKI, TAZUKE; KIYOSHI, TAKAMATSU; YUKICHI, YAMAGUCHI; RYUICHI
Year of Publication 21.11.1995
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Year of Publication 21.11.1995
Patent