Physically based modeling of dislocation loops in ion implantation processing in silicon
Castrillo, P., Martin-Bragado, I., Pinacho, R., Jaraiz, M., Rubio, J.E., Mok, K.R.C., Miguel-Herrero, F.J., Barbolla, J.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2005)
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