Design and characterization of next-generation micromirrors fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process
Michalicek, M.A., Comtois, J.H., Barren, C.C.
Published in 1997 Proceedings Second Annual IEEE International Conference on Innovative Systems in Silicon (1997)
Published in 1997 Proceedings Second Annual IEEE International Conference on Innovative Systems in Silicon (1997)
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Conference Proceeding
MOEMS for adaptive optics
Comtois, J.H., Michalicek, M.A., Clark, N., Cowan, W.
Published in 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369) (1998)
Published in 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369) (1998)
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Conference Proceeding
Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process
Comtois, J.H., Michalicek, M.A., Barron, C.C.
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
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Conference Proceeding
Solder self-alignment for optical MEMS
Harsh, K.F., Kladitis, P.E., Michalicek, M.A., Jianglong Zhang, Wenge Zhang, Tuantranont, A., Bright, V.M., Lee, Y.C.
Published in 1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999 Annual Meeting (Cat. No.99CH37009) (1999)
Published in 1999 IEEE LEOS Annual Meeting Conference Proceedings. LEOS'99. 12th Annual Meeting. IEEE Lasers and Electro-Optics Society 1999 Annual Meeting (Cat. No.99CH37009) (1999)
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Conference Proceeding