Comparison of techniques for detecting metal contamination in silicon wafers
Polignano, M.L., Borionetti, G., Galbiati, A., Grasso, S., Mica, I., Nutsch, A.
Published in Spectrochimica acta. Part B: Atomic spectroscopy (01.11.2018)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (01.11.2018)
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Journal Article
Proximity gettering of slow diffuser contaminants in CMOS image sensors
Russo, F., Moccia, G., Nardone, G., Alfonsetti, R., Polsinelli, G., D’Angelo, A., Patacchiola, A., Liverani, M., Pianezza, P., Lippa, T., Carlini, M., Polignano, M.L., Mica, I., Cazzini, E., Ceresoli, M., Codegoni, D.
Published in Solid-state electronics (01.01.2014)
Published in Solid-state electronics (01.01.2014)
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Journal Article
A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing
Polignano, M. L., Codegoni, D., Grasso, S., Mica, I., Borionetti, G., Nutsch, A.
Published in Physica status solidi. A, Applications and materials science (01.03.2015)
Published in Physica status solidi. A, Applications and materials science (01.03.2015)
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Journal Article
Contamination by slow diffusers in ion implantation processes: The examples of molybdenum and tungsten
Polignano, M.L., Mica, I., Barbarossa, F., Galbiati, A., Grasso, S., Soncini, V.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2015)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2015)
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Journal Article
Detection and reduction of tungsten contamination in ion implantation processes
Polignano, M. L., Galbiati, A., Grasso, S., Mica, I., Barbarossa, F., Magni, D.
Published in Physica status solidi. C (01.12.2016)
Published in Physica status solidi. C (01.12.2016)
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Journal Article
Optimization of laser anneal conditions for implanted shallow p/n-junctions
Soncini, V., Mica, I., Grasso, S., Polignano, M.L., Sansone, M.A., Margutti, G., Muzi, L.
Published in Microelectronic engineering (01.08.2014)
Published in Microelectronic engineering (01.08.2014)
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Journal Article
Conference Proceeding
Thermoreflectance temperature imaging of integrated circuits: calibration technique and quantitative comparison with integrated sensors and simulations
Tessier, G, Polignano, M-L, Pavageau, S, Filloy, C, Fournier, D, Cerutti, F, Mica, I
Published in Journal of physics. D, Applied physics (07.10.2006)
Published in Journal of physics. D, Applied physics (07.10.2006)
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Journal Article
Crystal defects and junction properties in the evolution of device fabrication technology
Mica, I, Polignano, M L, Carnevale, G, Ghezzi, P, Brambilla, M, Cazzaniga, F, Martinelli, M, Pavia, G, Bonera, E
Published in Journal of physics. Condensed matter (16.12.2002)
Published in Journal of physics. Condensed matter (16.12.2002)
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Journal Article
Conference Proceeding
The role of the substrate in the high energy boron implantation damage recovering
Mica, I., Di Piazza, L., Laurin, L., Mariani, M., Mauri, A.G., Polignano, M.L., Ricci, E., Sammiceli, F., Spoldi, G.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.03.2009)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.03.2009)
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Journal Article
The evolution of the ion implantation damage in device processing
Polignano, M. L., Mica, I., Bontempo, V., Cazzaniga, F., Mariani, M., Mauri, A., Pavia, G., Sammiceli, F., Spoldi, G.
Published in Journal of materials science. Materials in electronics (01.12.2008)
Published in Journal of materials science. Materials in electronics (01.12.2008)
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Journal Article
Conference Proceeding
Electrical and microscopy analysis of dislocations in present generation devices
Mica, I., Polignano, M. L., Moreau, O., Codegoni, D., Prestini, P. F., Magni, P.
Published in Physica status solidi. C (01.07.2007)
Published in Physica status solidi. C (01.07.2007)
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Journal Article
The Chemical Probes Portal: an enhanced public resource providing expert advice on chemical tools for cancer research
Sanfelice, D., Antolin, A., Crisp, A., Villasclaras-Fernandez, E., Mica, I., Chen, Y., Müller-Knapp, S., Collins, I., Al-Lazikani, B., Edwards, A.M., Workman, P.
Published in European journal of cancer (1990) (01.10.2022)
Published in European journal of cancer (1990) (01.10.2022)
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Journal Article
A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing: Metal and organic contamination in Si device processing
Polignano, M. L., Codegoni, D., Grasso, S., Mica, I., Borionetti, G., Nutsch, A.
Published in Physica status solidi. A, Applications and materials science (01.03.2015)
Published in Physica status solidi. A, Applications and materials science (01.03.2015)
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Journal Article
(Invited) Impact of the Substrate Specifications on the Extended Defects Induced by the Deep Trench Isolation
Mica, Isabella, Monge Roffarello, Pierpaolo, Dutartre, Didier, Basso, Michele, Abbadie, Alexandra, Frascaroli, Jacopo, Tonini, Marta, Livellara, Luisito, Mari, Guido Maria, Bertaiola, Simone, Illuzzi, Francesca
Published in ECS transactions (07.05.2021)
Published in ECS transactions (07.05.2021)
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Journal Article
Palladium contamination in silicon
Polignano, M.L., Mica, I., Ceresoli, M., Codegoni, D., Somaini, F., Bianchi, I., Volonghi, D.
Published in Solid-state electronics (01.04.2015)
Published in Solid-state electronics (01.04.2015)
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Journal Article
Review-Characterization of Metal-Contamination Effects in Silicon
Polignano, M. L., Codegoni, D., Galbiati, A., Grasso, S., Mica, I., Moccia, G., Nardone, G., Russo, F.
Published in ECS journal of solid state science and technology (01.01.2016)
Published in ECS journal of solid state science and technology (01.01.2016)
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Journal Article
Analysis of Near-Surface Metal Contamination by Photoluminescence Measurements
Polignano, M. L., Galbiati, A., Mica, I., Magni, D., Cseh, D., Jay, F., Basa, P., Laurent, N., Lajtos, I., Molnar, G., Dudas, L., Roszol, L., Jastrzebski, L.
Published in ECS journal of solid state science and technology (01.01.2018)
Published in ECS journal of solid state science and technology (01.01.2018)
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Journal Article