Electrical Properties Measurement for Interface Research in Silicon Bonding
Miao, Gu-Jin, Zhang, Zhao-Hua, Ren, Tian-Ling, Zhou, Chang-Jian, Chen, Tao, Lin, Hui-Wang, Liu, Li-Tian
Published in ECS transactions (22.02.2010)
Published in ECS transactions (22.02.2010)
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Journal Article
Electrical Properties Measurement for Interface Research in Silicon Bonding
Miao, Gu-Jin, Zhang, Zhao-Hua, Ren, Tian-Ling, Lin, Hui-Wang, Liu, Li-Tian
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Get full text
Journal Article