Reducing Environmentally Induced Defects While Maintaining Productivity
van Roijen, R., Conti, S. G., Keyser, R., Arndt, R., Burda, R., Ayala, J., Henry, R. O., Levy, J., Maxson, J., Meyette, E., Steer, W., Tabakman, K., Chienfan Yu
Published in IEEE transactions on semiconductor manufacturing (01.02.2013)
Published in IEEE transactions on semiconductor manufacturing (01.02.2013)
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Journal Article
Conference Proceeding
Reducing environmentally induced defects while maintaining productivity
van Roijen, R., Conti, S., Keyser, R., Arndt, R., Burda, R., Ayala, J., Henry, R., Levy, J., Maxson, J., Meyette, E., Steer, W., Tabakman, K., Yu, C.
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
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Conference Proceeding
Challenges in 65nm Poly, RX and STI Defect Learning
Chienfan Yu, Ayala, J., Cung Tran, Gay, J., Santiago, A., Meyette, E., Hampton, E., Oakley, G., Bandy, K., McCormack, T., Venigalla, R., Scholl, F.
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
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Conference Proceeding
High Volume Manufacturing Ramp In 90nm Dual Stress Liner Technology
Gehres, R., Malik, R., Amos, R., Brown, J., Butt, S., Chan, A., Collins, C., Colwill, B., Davies, B., Gabor, A., Le, N., Lindo, P., Mello, K., Meyette, E., Nastasi, V., Patrick, J., Piper, A., Prakash, D.P., Rust, T., Santiago, A., Su, T., Van Roijen, R., Rutten, M., Slisher, D., Tessier, B., Tetzloff, J., Wehella-Gamage, D., Wise, R., Yang, Q., Yu, C., Divakaruni, R., Goth, G.
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
Published in The 17th Annual SEMI/IEEE ASMC 2006 Conference (2006)
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Conference Proceeding