Laser-doping of crystalline silicon substrates using doped silicon nanoparticles
Meseth, Martin, Lamine, Kais, Dehnen, Martin, Kayser, Sven, Brock, Wolfgang, Behrenberg, Dennis, Orthner, Hans, Elsukova, Anna, Hartmann, Nils, Wiggers, Hartmut, Hülser, Tim, Nienhaus, Hermann, Benson, Niels, Schmechel, Roland
Published in Thin solid films (02.12.2013)
Published in Thin solid films (02.12.2013)
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Journal Article
Excimer laser doping using highly doped silicon nanoparticles
Meseth, Martin, Kunert, Bernd Christian, Bitzer, Lucas, Kunze, Frederik, Meyer, Sebastian, Kiefer, Fabian, Dehnen, Martin, Orthner, Hans, Petermann, Nils, Kummer, Malin, Wiggers, Hartmut, Harder, Nils-Peter, Benson, Niels, Schmechel, Roland
Published in Physica status solidi. A, Applications and materials science (01.11.2013)
Published in Physica status solidi. A, Applications and materials science (01.11.2013)
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Journal Article
Excimer laser doping using highly doped silicon nanoparticles: Laser doping using SI nanoparcticles
Meseth, Martin, Kunert, Bernd Christian, Bitzer, Lucas, Kunze, Frederik, Meyer, Sebastian, Kiefer, Fabian, Dehnen, Martin, Orthner, Hans, Petermann, Nils, Kummer, Malin, Wiggers, Hartmut, Harder, Nils-Peter, Benson, Niels, Schmechel, Roland
Published in Physica status solidi. A, Applications and materials science (01.11.2013)
Published in Physica status solidi. A, Applications and materials science (01.11.2013)
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Journal Article
Laser-Doping of Crystalline Silicon Substrates using Doped Silicon Nanoparticles
Meseth, Martin, Lamine, Kais, Dehnen, Martin, Kayser, Sven, Brock, Wolfgang, Behrenberg, Dennis, Orthner, Hans, Elsukova, Anna, Hartmann, Nils, Wiggers, Hartmut, Hülser, Tim, Nienhaus, Hermann, Benson, Niels, Schmechel, Roland
Published in arXiv.org (02.07.2013)
Published in arXiv.org (02.07.2013)
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Journal Article