Moisture-resistant properties of SiNx films prepared by PECVD
Lin, Hui, Xu, Liqiang, Chen, Xiang, Wang, Xuhong, Sheng, Mei, Stubhan, Frank, Merkel, Karl-Heinz, Wilde, Juergen
Published in Thin solid films (01.11.1998)
Published in Thin solid films (01.11.1998)
Get full text
Journal Article
a-SiC sub(x):H films deposited by plasma-enhanced chemical vapor deposition at low temperature used for moisture and corrosion resistant applications
Jiang, Lijun, Chen, Xiang, Wang, Xuhong, Xu, Liqiang, Stubhan, Frank, Merkel, Karl-Heinz
Published in Thin solid films (01.01.1999)
Get full text
Published in Thin solid films (01.01.1999)
Journal Article
a-SiC x:H films deposited by plasma-enhanced chemical vapor deposition at low temperature used for moisture and corrosion resistant applications
Jiang, Lijun, Chen, Xiang, Wang, Xuhong, Xu, Liqiang, Stubhan, Frank, Merkel, Karl-Heinz
Published in Thin solid films (1999)
Published in Thin solid films (1999)
Get full text
Journal Article
Moisture-resistant properties of SiN x films prepared by PECVD
Lin, Hui, Xu, Liqiang, Chen, Xiang, Wang, Xuhong, Sheng, Mei, Stubhan, Frank, Merkel, Karl-Heinz, Wilde, Juergen
Published in Thin solid films (1998)
Published in Thin solid films (1998)
Get full text
Journal Article
Gehäuse für mikroelektronische Bauelemente und Verfahren zu seiner Herstellung
WILDE, JUERGEN, MERKEL, KARL-HEINZ, RENTSCH, ARNO, KILIAN, HERMANN, SCHUCH, BERNHARD
Year of Publication 10.03.2005
Get full text
Year of Publication 10.03.2005
Patent
Kunststoffolie
WARTUSCH, JOHANN., 34246 VELLMAR, DE, MERKEL, KARL-HEINZ., 60528 FRANKFURT, DE
Year of Publication 20.11.1997
Get full text
Year of Publication 20.11.1997
Patent
Gehäuse für Bauelemente der Mikroelektronik und Verfahren zu seiner Herstellung
KILIAN, HERMANN., 91456 DIESPECK, DE, WILDE, JUERGEN., 63814 MAINASCHAFF, DE, SCHUCH, BERNHARD., 91616 NEUSITZ, DE, RENTSCH, ARNO., 65779 KELKHEIM, DE, MERKEL, KARL-HEINZ., 60528 FRANKFURT, DE
Year of Publication 20.02.1997
Get full text
Year of Publication 20.02.1997
Patent
HOUSING FOR MICROELECTRONICS COMPONENTS AND MODULES AND PROCESS FOR PRODUCING IT
WILDE, JUERGEN, MERKEL, KARL-HEINZ, RENTSCH, ARNO, KILIAN, HERMANN, SCHUCH, BERNHARD
Year of Publication 27.02.1997
Get full text
Year of Publication 27.02.1997
Patent