High- k dielectrics for future generation memory devices (Invited Paper)
Kittl, J.A., Opsomer, K., Popovici, M., Menou, N., Kaczer, B., Wang, X.P., Adelmann, C., Pawlak, M.A., Tomida, K., Rothschild, A., Govoreanu, B., Degraeve, R., Schaekers, M., Zahid, M., Delabie, A., Meersschaut, J., Polspoel, W., Clima, S., Pourtois, G., Knaepen, W., Detavernier, C., Afanas’ev, V.V., Blomberg, T., Pierreux, D., Swerts, J., Fischer, P., Maes, J.W., Manger, D., Vandervorst, W., Conard, T., Franquet, A., Favia, P., Bender, H., Brijs, B., Van Elshocht, S., Jurczak, M., Van Houdt, J., Wouters, D.J.
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Journal Article
Conference Proceeding
Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes
Menou, N., Popovici, M., Clima, S., Opsomer, K., Polspoel, W., Kaczer, B., Rampelberg, G., Tomida, K., Pawlak, M. A., Detavernier, C., Pierreux, D., Swerts, J., Maes, J. W., Manger, D., Badylevich, M., Afanasiev, V., Conard, T., Favia, P., Bender, H., Brijs, B., Vandervorst, W., Van Elshocht, S., Pourtois, G., Wouters, D. J., Biesemans, S., Kittl, J. A.
Published in Journal of applied physics (01.11.2009)
Published in Journal of applied physics (01.11.2009)
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Journal Article
Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers
Manger, D., Kaczer, B., Menou, N., Clima, S., Wouters, D.J., Afanas’ev, V.V., Kittl, J.A.
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Journal Article
Effect of the composition on the bandgap width of high-κ MexTiyOz (Me = Hf, Ta, Sr) layers
WANG, W. C, BADYLEVICH, M, WENGER, Ch, AFANAS'EV, V. V, STESMANS, A, POPOVICI, M, TOMIDA, K, MENOU, N, KITTL, J. A, LUKOSIUS, M, BARISTIRAN KAYNAK, C
Published in Thin solid films (30.06.2011)
Published in Thin solid films (30.06.2011)
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Conference Proceeding
Journal Article
Degradation and recovery of polarization under synchrotron x rays in SrBi2Ta2O9 ferroelectric capacitors
Menou, N., Castagnos, A.-M., Muller, Ch, Goguenheim, D., Goux, L., Wouters, D. J., Hodeau, J.-L., Dooryhee, E., Barrett, R.
Published in Journal of applied physics (15.02.2005)
Published in Journal of applied physics (15.02.2005)
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Journal Article
A highly reliable 3-D integrated SBT ferroelectric capacitor enabling FeRAM scaling
Goux, L., Russo, G., Menou, N., Lisoni, J.G., Schwitters, M., Paraschiv, V., Maes, D., Artoni, C., Corallo, G., Haspeslagh, L., Wouters, D.J., Zambrano, R., Muller, C.
Published in IEEE transactions on electron devices (01.04.2005)
Published in IEEE transactions on electron devices (01.04.2005)
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Journal Article
Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]
Popovici, M., Van Elshocht, S., Menou, N., Swerts, J., Pierreux, D., Delabie, A., Brijs, B., Conard, T., Opsomer, K., Maes, J. W., Wouters, D. J., Kittl, J. A.
Published in Journal of the Electrochemical Society (2010)
Published in Journal of the Electrochemical Society (2010)
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Journal Article
In situ synchrotron x-ray diffraction study of electrical field induced fatigue in Pt/PbZr0.45Ti0.55O3/Pt ferroelectric capacitors
N Menou, Muller, Ch, Baturin, I S, Kuznetsov, D K, Shur, V Ya, Hodeau, J L, Schneller, T
Published in Journal of physics. Condensed matter (07.12.2005)
Published in Journal of physics. Condensed matter (07.12.2005)
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Journal Article
Metal-Organic Chemical Vapor Deposition of Ferroelectric SrBi2Ta2O9 Films from a Fluorine-Containing Precursor System
Condorelli, G. G, Favazza, M, Bedoya, C, Baeri, A, Anastasi, G, Lo Nigro, R, Menou, N, Muller, C, Lisoni, J. G, Wouters, D, Fragalà, I. L
Published in Chemistry of materials (21.02.2006)
Published in Chemistry of materials (21.02.2006)
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Journal Article
Composition control and ferroelectric properties of sidewalls in integrated three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
Goux, L., Lisoni, J. G., Schwitters, M., Paraschiv, V., Maes, D., Haspeslagh, L., Wouters, D. J., Menou, N., Turquat, Ch, Madigou, V., Muller, Ch, Zambrano, R.
Published in Journal of applied physics (01.09.2005)
Published in Journal of applied physics (01.09.2005)
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Journal Article
Microstructural analysis of integrated pin-shaped two-dimensional and three-dimensional ferroelectric capacitors from micro-focused synchrotron X-ray techniques
Menou, N., Muller, Ch, Goux, L., Barrett, R., Lisoni, J. G., Schwitters, M., Wouters, D. J.
Published in Journal of applied crystallography (01.06.2006)
Published in Journal of applied crystallography (01.06.2006)
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Journal Article
Effect of Penetrating Irradiation on Polarization Reversal in PZT Thin Films
Kuznetsov, D. K., Shur, V. Ya, Baturin, I. S., Menou, N., Muller, Ch, Schneller, T., Sternberg, A.
Published in Ferroelectrics (01.01.2006)
Published in Ferroelectrics (01.01.2006)
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Journal Article
Failure Analysis of FeCAPs. Electrical Behaviour Under Synchrotron X-Ray Irradiation
MENOU, N., CASTAGNOS, A. -M., MULLER, CH, JOHNSON, J., WOUTERS, D. J., BATURIN, I., SHUR, V. YA
Published in Integrated ferroelectrics (01.01.2004)
Published in Integrated ferroelectrics (01.01.2004)
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Journal Article
Effect of the composition on the bandgap width of high-κ Me xTi yO z (Me = Hf, Ta, Sr) layers
Wang, W.C., Badylevich, M., Afanas'ev, V.V., Stesmans, A., Popovici, M., Tomida, K., Menou, N., Kittl, J.A., Lukosius, M., Baristiran Kaynak, C., Wenger, Ch
Published in Thin solid films (2011)
Published in Thin solid films (2011)
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Journal Article
Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
Clima, S., Pourtois, G., Menou, N., Popovici, M., Rothschild, A., Kaczer, B., Van Elshocht, S., Wang, X.P., Swerts, J., Pierreux, D., De Gendt, S., Wouters, D.J., Kittl, J.A.
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Journal Article