A-Si/SiO 2 nanolaminates for tuning the complex refractive index and band gap in optical interference coatings
Kreuzer, Karl, Henning, Philipp, Vergöhl, Michael, Bruns, Stefan, Melzig, Thomas, Patzig, Christian, Feder, René
Published in Applied optics. Optical technology and biomedical optics (20.02.2024)
Published in Applied optics. Optical technology and biomedical optics (20.02.2024)
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Journal Article
Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations
Bruns, Stefan, Henning, Philipp, Melzig, Thomas, Terhürne, Jörg, Vergöhl, Michael
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
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Journal Article
Influence of fitting algorithms on thickness determination during monitoring of optical coatings
Melzig, Thomas, Amochkina, Tatiana, Bruns, Stefan, Farr, Philipp, Terhürne, Jörg, Trubetskov, Michael, Vergöhl, Michael
Published in Surface & coatings technology (30.01.2024)
Published in Surface & coatings technology (30.01.2024)
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Journal Article
Precise control and adjustment of uniformity for optical coatings on 2D and 3D components
Britze, Chris, Farr, Philipp, Vergöhl, Michael, Pflug, Andreas, Melzig, Thomas, Bruns, Stefan, Schäfer, Bernd, Mann, Klaus, Terhürne, Jörg
Published in Surface & coatings technology (30.03.2024)
Published in Surface & coatings technology (30.03.2024)
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Journal Article
Simulation of linear magnetron discharges in 2D and 3D
Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Schäfer, Lothar, Bräuer, Günter
Published in Surface & coatings technology (15.12.2014)
Published in Surface & coatings technology (15.12.2014)
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Journal Article
3D PIC-MC simulation of anode effects in dual magnetron discharges
Melzig, Thomas, Siemers, Michael, Pflug, Andreas, Rank, Rolf
Published in Surface & coatings technology (25.02.2014)
Published in Surface & coatings technology (25.02.2014)
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Journal Article
Conference Proceeding
Practice-oriented optical thin film growth simulation via multiple scale approach
Turowski, Marcus, Jupé, Marco, Melzig, Thomas, Moskovkin, Pavel, Daniel, Alain, Pflug, Andreas, Lucas, Stéphane, Ristau, Detlev
Published in Thin solid films (01.10.2015)
Published in Thin solid films (01.10.2015)
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Journal Article
Model based investigation of Ar+ ion damage in DC magnetron sputtering
Siemers, Michael, Pflug, Andreas, Melzig, Thomas, Gehrke, Kai, Weimar, Andreas, Szyszka, Bernd
Published in Surface & coatings technology (25.02.2014)
Published in Surface & coatings technology (25.02.2014)
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Journal Article
Conference Proceeding
Numerical optimization of baffles for sputtering optical precision filters
Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael
Published in Surface & coatings technology (25.02.2014)
Published in Surface & coatings technology (25.02.2014)
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Journal Article
Conference Proceeding
Heuristic modeling of the doping efficiency in sputtered TCO layers
Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Sittinger, Volker, Schäfer, Lothar
Published in Surface & coatings technology (15.04.2015)
Published in Surface & coatings technology (15.04.2015)
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Journal Article
Modeling of gas flow and deposition profile in HWCVD processes
Pflug, Andreas, Höfer, Markus, Harig, Tino, Armgardt, Markus, Britze, Chris, Siemers, Michael, Melzig, Thomas, Schäfer, Lothar
Published in Thin solid films (30.11.2015)
Published in Thin solid films (30.11.2015)
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Journal Article
마그네트론 스퍼터링에 의해 평면형 또는 형상화된 표면들을 갖는 기판들을 코팅하기 위한 디바이스 및 방법
VERGOHL MICHAEL, ZICKENROTT TOBIAS, BRUNS STEFAN, PFLUG ANDREAS, KAISER ANDRE, MELZIG THOMAS
Year of Publication 07.12.2021
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Year of Publication 07.12.2021
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