2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald
Published in Sensors (Basel, Switzerland) (18.11.2020)
Published in Sensors (Basel, Switzerland) (18.11.2020)
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Journal Article
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald
Published in Micromachines (Basel) (15.04.2022)
Published in Micromachines (Basel) (15.04.2022)
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Journal Article
Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in IEEE sensors journal (15.04.2021)
Published in IEEE sensors journal (15.04.2021)
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Journal Article
Plastic Waste RecyclingA Chemical Recycling Perspective
Schade, Alexander, Melzer, Marcel, Zimmermann, Sven, Schwarz, Thomas, Stoewe, Klaus, Kuhn, Harald
Published in ACS sustainable chemistry & engineering (19.08.2024)
Published in ACS sustainable chemistry & engineering (19.08.2024)
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Journal Article
Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation
Preuß, Andrea, Tamuliene, Jelena, Madajska, Katarzyna, Szymanska, Iwona B., Korb, Marcus, Rüffer, Tobias, Jeschke, Janine, Melzer, Marcel, Bankwitz, Jörn, Schulz, Stefan E., Lang, Heinrich
Published in European journal of inorganic chemistry (10.05.2020)
Published in European journal of inorganic chemistry (10.05.2020)
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Journal Article
Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers
Stoeckel, Chris, Meinel, Katia, Melzer, Marcel, Otto, Thomas
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in 2019 IEEE SENSORS (01.10.2019)
Published in 2019 IEEE SENSORS (01.10.2019)
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Conference Proceeding
Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursorElectronic supplementary information (ESI) available. See DOI: 10.1039/c7ra08810h
Melzer, Marcel, Nichenametla, Charan K, Georgi, Colin, Lang, Heinrich, Schulz, Stefan E
Year of Publication 27.10.2017
Year of Publication 27.10.2017
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Journal Article
Chemical vapor deposition of ruthenium-based layers by a single-source approach
Jeschke, Janine, Möckel, Stefan, Korb, Marcus, Rüffer, Tobias, Assim, Khaybar, Melzer, Marcel, Herwig, Gordon, Georgi, Colin, Schulz, Stefan E., Lang, Heinrich
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2016)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2016)
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Journal Article
Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications
Melzer, Marcel, Waechtler, Thomas, Müller, Steve, Fiedler, Holger, Hermann, Sascha, Rodriguez, Raul D., Villabona, Alexander, Sendzik, Andrea, Mothes, Robert, Schulz, Stefan E., Zahn, Dietrich R.T., Hietschold, Michael, Lang, Heinrich, Gessner, Thomas
Published in Microelectronic engineering (01.07.2013)
Published in Microelectronic engineering (01.07.2013)
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Journal Article
Conference Proceeding
Chemical vapor deposition of ruthenium-based layers by a single-source approachElectronic supplementary information (ESI) available: Additional SEM, EDX, XPS and XRPD data. Crystallographic data of 4b,c and 4e,f. CCDC 1430280 (4b), 1430281 (4c), 1430282 (4e), 1430283 (4f) and 1430284 (4g). For ESI and crystallographic data in CIF or other electronic format see DOI: 10.1039/c5tc03930d
Jeschke, Janine, Möckel, Stefan, Korb, Marcus, Rüffer, Tobias, Assim, Khaybar, Melzer, Marcel, Herwig, Gordon, Georgi, Colin, Schulz, Stefan E, Lang, Heinrich
Year of Publication 17.03.2016
Year of Publication 17.03.2016
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Journal Article
High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors
Shaporin, Alexey, Wecker, Julia, Runge, Juliane, Voigt, Sebastian, Melzer, Marcel, Kurth, Steffen, Hiller, Karla
Published in 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (07.04.2024)
Published in 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (07.04.2024)
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Conference Proceeding
Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2
Dittmar, Nils, Berger, Birk, Melzer, Marcel, Kuchler, Matthias, Meinecke, Christoph, Haase, Micha, Reuter, Danny
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
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Conference Proceeding
Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements
Shaporin, Alexey, Stockel, Chris, Melzer, Marcel, Schaller, Falk, Forke, Roman, Zimmermann, Sven, Kuhn, Harald
Published in 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (17.04.2023)
Published in 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (17.04.2023)
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Conference Proceeding
Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride
Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array
Stoeckel, Chris, Melzer, Marcel, Meinel, Katja, Tavakolibasti, Majid, Forke, Roman, Zimmermann, Sven, Otto, Thomas, Kuhn, Harald
Published in 2021 Smart Systems Integration (SSI) (27.04.2021)
Published in 2021 Smart Systems Integration (SSI) (27.04.2021)
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Conference Proceeding