Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
Candler, R.N., Hopcroft, M.A., Bongsang Kim, Woo-Tae Park, Melamud, R., Agarwal, M., Yama, G., Partridge, A., Lutz, M., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.12.2006)
Published in Journal of microelectromechanical systems (01.12.2006)
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Journal Article
Temperature-Insensitive Composite Micromechanical Resonators
Melamud, R., Chandorkar, S.A., Bongsang Kim, Hyung Kyu Lee, Salvia, J.C., Bahl, G., Hopcroft, M.A., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.12.2009)
Published in Journal of microelectromechanical systems (01.12.2009)
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Journal Article
Temperature Dependence of Quality Factor in MEMS Resonators
Bongsang Kim, Hopcroft, M.A., Candler, R.N., Jha, C.M., Agarwal, M., Melamud, R., Chandorkar, S.A., Yama, G., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.06.2008)
Published in Journal of microelectromechanical systems (01.06.2008)
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Journal Article
Stability of Silicon Microelectromechanical Systems Resonant Thermometers
Ng, E. J., Hyung Kyu Lee, Chae Hyuck Ahn, Melamud, R., Kenny, T. W.
Published in IEEE sensors journal (01.03.2013)
Published in IEEE sensors journal (01.03.2013)
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Journal Article
Thermal Isolation of Encapsulated MEMS Resonators
Jha, C.M., Hopcroft, M.A., Chandorkar, S.A., Salvia, J.C., Agarwal, M., Candler, R.N., Melamud, R., Bongsang Kim, Kenny, T.W.
Published in Journal of microelectromechanical systems (01.02.2008)
Published in Journal of microelectromechanical systems (01.02.2008)
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Journal Article
Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators
Bahl, G., Melamud, R., Kim, B., Chandorkar, S.A., Salvia, J.C., Hopcroft, M.A., Elata, D., Hennessy, R.G., Candler, R.N., Howe, R.T., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.02.2010)
Published in Journal of microelectromechanical systems (01.02.2010)
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Journal Article
AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators
Bahl, G, Salvia, J C, Melamud, R, Bongsang Kim, Howe, R T, Kenny, T W
Published in Journal of microelectromechanical systems (01.04.2011)
Published in Journal of microelectromechanical systems (01.04.2011)
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Journal Article
Vacuum encapsulated resonators for humidity measurement
Hennessy, Robert G., Shulaker, Max M., Messana, Matt, Graham, Andrew B., Klejwa, Nathan, Provine, J., Kenny, Tom W., Howe, Roger T.
Published in Sensors and actuators. B, Chemical (01.08.2013)
Published in Sensors and actuators. B, Chemical (01.08.2013)
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Journal Article
A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices
Graham, A.B., Messana, M.W., Hartwell, P.G., Provine, J., Yoneoka, S., Melamud, R., Bongsang Kim, Howe, R.T., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.02.2010)
Published in Journal of microelectromechanical systems (01.02.2010)
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Journal Article
Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations
Yoneoka, S, Salvia, J C, Bahl, G, Melamud, R, Chandorkar, S A, Kenny, T W
Published in Journal of microelectromechanical systems (01.10.2010)
Published in Journal of microelectromechanical systems (01.10.2010)
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Journal Article
Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators With Integrated Actuation Electrodes
Kuan-Lin Chen, Shasha Wang, Salvia, James C, Melamud, Renata, Howe, Roger T, Kenny, Thomas W
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.03.2011)
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.03.2011)
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Journal Article
Stability measurements of silicon MEMS resonant thermometers
Ng, E. J., Hyung Kyu Lee, Ahn, Chae Hyuck, Melamud, R., Kenny, T. W.
Published in 2011 IEEE SENSORS Proceedings (01.10.2011)
Published in 2011 IEEE SENSORS Proceedings (01.10.2011)
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Conference Proceeding
MEMS resonator with colocated temperature sensor
Hagelin, Paul M, Hill, Ginel C, Partridge, Aaron, Lutz, Markus, Berger, Renata Melamud, Grosjean, Charles I
Year of Publication 17.09.2024
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Year of Publication 17.09.2024
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