Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry
Cheng, Jie, Wang, Tongqing, Mei, Hegeng, Zhou, Wenbin, Lu, Xinchun
Published in Applied surface science (30.11.2014)
Published in Applied surface science (30.11.2014)
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Journal Article
Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same
LU XINCHUN, XU ZHENJIE, PEI ZHAOHUI, LUO JIANBIN, MEI HEGENG, WANG TONGQING, ZHANG LIANQING, ZHAO DEWEN, SHEN PAN, HE YONGYONG
Year of Publication 22.09.2015
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Year of Publication 22.09.2015
Patent
CHEMICAL MECHANICAL POLISHING MACHINE AND CHEMICAL MECHANICAL POLISHING APPARATUS COMPRISING THE SAME
LU XINCHUN, XU ZHENJIE, PEI ZHAOHUI, LUO JIANBIN, MEI HEGENG, WANG TONGQING, ZHANG LIANQING, ZHAO DEWEN, SHEN PAN, HE YONGYONG
Year of Publication 23.05.2013
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Year of Publication 23.05.2013
Patent
System and method for inhibiting and monitoring electrochemical corrosion of seawater pipeline system
LOU FUQIANG, ZHANG CONG, MEI HEGENG, HUANG GUO'AN, GAO XINHUA, ZHANG HAIYAN, ZHOU HUAN, LIU YUANKANG, YANG YINQING, WU WEI, DU ZHANGLIN, SONG YANG, YANG BIN, QIU BIN, LI HANJUN
Year of Publication 06.09.2019
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Year of Publication 06.09.2019
Patent
Scrubbing device for wafer
LU XINCHUN, PEI ZHAOHUI, LUO JIANBIN, MEI HEGENG, HUANG YATING, HE YONGYONG
Year of Publication 14.11.2012
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Year of Publication 14.11.2012
Patent