The magnetic field-assisted assembly of nanoscale semiconductor devices: A new technique
Shet, Sudhakar, Mehta, Vishal R, Fiory, Anthony T, Lepselter, Martin P, Ravindra, N M
Published in JOM (1989) (01.10.2004)
Published in JOM (1989) (01.10.2004)
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Journal Article
Rapid thermal activation and diffusion of boron and phosphorus implants
Fiory, A.T., Chawda, S.G., Madishetty, S., Mehta, V.R., Ravindra, N.M., McCoy, S.P., Lefrancois, M.E., Bourdelle, K.K., McKinley, J.M., Gossmann, H.-J.L., Agarwal, A.
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
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Conference Proceeding