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Reliability for systems of degrading components with distinct component shock sets
Song, Sanling, Coit, David W., Feng, Qianmei
Published in Reliability engineering & system safety (01.12.2014)
Published in Reliability engineering & system safety (01.12.2014)
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Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment
Jansen, H V, de Boer, M J, Unnikrishnan, S, Louwerse, M C, Elwenspoek, M C
Published in Journal of micromechanics and microengineering (01.03.2009)
Published in Journal of micromechanics and microengineering (01.03.2009)
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Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
Fraga, M. A., Furlan, H., Pessoa, R. S., Massi, M.
Published in Microsystem technologies : sensors, actuators, systems integration (01.01.2014)
Published in Microsystem technologies : sensors, actuators, systems integration (01.01.2014)
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Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback Control
Dijkstra, Marcel, Lammerink, Theo S. J., de Boer, Meint J., Berenschot, Erwin J. W., Wiegerink, Remco J., Elwenspoek, Miko
Published in Journal of microelectromechanical systems (01.08.2014)
Published in Journal of microelectromechanical systems (01.08.2014)
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Design and fabrication of a micromachined gyroscope with high shock resistance
Zhou, Jian, Jiang, Tao, Jiao, Ji-wei, Wu, Ming
Published in Microsystem technologies : sensors, actuators, systems integration (01.01.2014)
Published in Microsystem technologies : sensors, actuators, systems integration (01.01.2014)
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The marching velocity of the capillary meniscus in a microchannel
Yang, Lung-Jieh, Yao, Tze-Jung, Tai, Yu-Chong
Published in Journal of micromechanics and microengineering (01.02.2004)
Published in Journal of micromechanics and microengineering (01.02.2004)
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Stabilization of electrostatically actuated microstructures using parametric excitation
Krylov, Slava, Harari, Isaac, Cohen, Yaron
Published in Journal of micromechanics and microengineering (01.06.2005)
Published in Journal of micromechanics and microengineering (01.06.2005)
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Monte carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
Mariani, Stefano, Martini, Roberto, Ghisi, Aldo, Corigliano, Alberto, Simoni, Barbara
Published in International journal of fracture (01.01.2011)
Published in International journal of fracture (01.01.2011)
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